Subsurface puas ntawm optical ntsiab

1 Kev txhais thiab ua rau muaj kev puas tsuaj subsurface

Qhov kev puas tsuaj ntawm cov khoom siv kho qhov muag (SSD, sub-deg puas) feem ntau yog hais nyob rau hauv high-precision kho qhov muag daim ntaub ntawv xws li khaus laser systems thiab lithography tshuab, thiab nws lub neej txwv qhov kawg ua tiav ntawm optical Cheebtsam thiab ntxiv cuam tshuam rau cov duab. kev ua tau zoo ntawm optical systems, yog li nws yuav tsum tau them nyiaj txaus. Kev puas tsuaj subsurface feem ntau yog tshwm sim los ntawm cov kab nrib pleb hauv qhov chaw thiab cov txheej txheem kev ntxhov siab sab hauv, uas yog tshwm sim los ntawm qee qhov seem seem thiab deformation ntawm cov khoom muaj pes tsawg leeg nyob ze ntawm qhov chaw. Cov qauv kev puas tsuaj subsurface yog qhia raws li hauv qab no: txheej txheej saum toj kawg nkaus yog txheej txheej polished sediment, thiab tom qab ntawd cov txheej txheem tawg thiab kev ntxhov siab deformation txheej yog txheej hauv qab, thiab cov khoom txheej tsis muaj kev puas tsuaj yog txheej sab hauv. Ntawm lawv, cov txheej txheem tawg thiab cov txheej txheem deformation yog qhov kev puas tsuaj ntawm subsurface.

ib

Subsurface puas qauv ntawm cov khoom siv kho qhov muag

Optical Cheebtsam ntawm cov khoom siv feem ntau yog iav, ceramics thiab lwm yam ntaub ntawv nyuaj thiab nkig, nyob rau hauv thaum ntxov ua theem ntawm lub Cheebtsam, yuav tsum mus los ntawm milling molding, nplua sib tsoo thiab ntxhib polishing txheej txheem, nyob rau hauv cov txheej txheem no, mechanical sib tsoo thiab tshuaj muaj pes tsawg leeg. thiab ua lub luag haujlwm. Cov cuab yeej abrasive lossis abrasive nyob rau hauv kev sib cuag nrog nto ntawm lub caij muaj cov yam ntxwv ntawm qhov tsis sib xws ntawm qhov loj me, thiab lub zog ntawm txhua qhov kev sib cuag ntawm lub ntsiab lus tsis sib xws, yog li cov txheej txheej convex thiab concave thiab cov txheej txheem sab hauv yuav yuav ua rau ntawm iav nto. Cov khoom siv tam sim no nyob rau hauv cov txheej txheem tawg yog cov khoom uas tau tawg thaum lub sij hawm sib tsoo, tab sis tsis tau poob ntawm qhov chaw, yog li qhov kev puas tsuaj ntawm qhov chaw yuav raug tsim. Txawm hais tias nws yog abrasive sib tsoo ntawm cov khoom xoob lossis CNC sib tsoo, qhov tshwm sim no yuav raug tsim los ntawm cov khoom siv. Qhov tshwm sim tiag tiag ntawm kev puas tsuaj sub-deg yog qhia hauv daim duab hauv qab no:

b

Subsurface puas rendering

2 Txoj kev ntsuas kev puas tsuaj hauv av

Txij li qhov kev puas tsuaj ntawm qhov chaw tsis tuaj yeem tsis quav ntsej, nws yuav tsum tau tswj xyuas zoo los ntawm cov tuam txhab kho qhov muag. Yuav kom tswj tau zoo, nws yog ib qho tsim nyog yuav tsum tau txheeb xyuas thiab txheeb xyuas qhov loj me ntawm qhov kev puas tsuaj ntawm qhov chaw ntawm qhov chaw, txij li thaum ntxov ntawm lub xyoo pua xeem, tib neeg tau tsim ntau txoj hauv kev los ntsuas thiab ntsuas qhov loj. ntawm subsurface puas tsuaj ntawm cov khoom, raws li cov hom ntawm cov degree ntawm kev cuam tshuam ntawm lub kho qhov muag tivthaiv, nws muaj peev xwm muab faib ua ob pawg: kev ntsuas kev puas tsuaj thiab tsis-destructive ntsuas (tsis-destructive testing).

Txoj kev ntsuas kev puas tsuaj, raws li lub npe qhia, yog qhov yuav tsum tau hloov cov qauv saum npoo ntawm cov khoom siv kho qhov muag, kom qhov kev puas tsuaj ntawm qhov chaw uas tsis yooj yim rau kev soj ntsuam tuaj yeem tshwm sim, thiab tom qab ntawd siv lub tshuab ntsuas ntsuas thiab lwm yam cuab yeej los soj ntsuam qhov Txoj kev ntsuas, txoj kev no feem ntau yog siv sijhawm ntev, tab sis nws cov txiaj ntsig ntsuas tau txhim khu kev qha thiab raug. Cov txheej txheem ntsuas tsis muaj kev puas tsuaj, uas tsis ua rau muaj kev puas tsuaj ntxiv rau cov khoom siv saum npoo, siv lub teeb, suab, lossis lwm yam khoom siv hluav taws xob los txheeb xyuas cov txheej txheem kev puas tsuaj subsurface, thiab siv cov khoom hloov pauv uas lawv tshwm sim hauv txheej los ntsuas qhov loj ntawm SSD, cov txheej txheem zoo li no yog qhov yooj yim thiab ceev, tab sis feem ntau yog kev soj ntsuam zoo. Raws li qhov kev faib tawm no, cov kev tshawb nrhiav tam sim no rau kev puas tsuaj ntawm qhov chaw muaj nyob hauv daim duab hauv qab no:

c

Kev faib tawm thiab cov ntsiab lus ntawm subsurface puas nrhiav kom paub txoj kev

Cov lus piav qhia luv luv ntawm cov kev ntsuas no hauv qab no:

A. Kev puas tsuaj

a) Txoj kev polishing

Ua ntej cov tsos ntawm magnetorheological polishing, cov neeg ua haujlwm kho qhov muag feem ntau siv Taper polishing los soj ntsuam qhov kev puas tsuaj ntawm cov khoom siv kho qhov muag, uas yog, txiav qhov chaw kho qhov muag raws li oblique Lub kaum sab xis los ua ib qho oblique sab hauv, thiab tom qab ntawd polishing oblique nto. Nws yog feem ntau ntseeg tias polishing yuav tsis ua rau cov thawj sub-deg puas. Cov kab nrib pleb ntawm SSD txheej yuav pom tseeb dua los ntawm kev sib xyaw ua ke nrog cov tshuaj reagents. Qhov tob, ntev thiab lwm yam ntaub ntawv ntawm sub-surface puas txheej yuav ntsuas los ntawm optical soj ntsuam ntawm inclined nto tom qab immersion. Tom qab ntawd, cov kws tshawb fawb tau tsim cov txheej txheem pob dimpling (Ball dimpling), uas yog siv cov khoom siv kheej kheej polishing rau polishing nto tom qab kev sib tsoo, ntuav ib lub qhov dej tawm, qhov tob ntawm lub qhov yuav tsum sib sib zog nqus li sai tau, thiaj li hais tias qhov kev soj ntsuam. ntawm sab ntawm lub qhov dej tuaj yeem tau txais cov ntaub ntawv kev puas tsuaj subsurface ntawm thawj qhov chaw.

Cov txheej txheem dav dav rau kev txheeb xyuas qhov kev puas tsuaj subsurface ntawm cov khoom siv kho qhov muag

Magnetorheological polishing (MRF) yog cov txheej txheem uas siv cov kua nplaum sib nqus los txhuam cov khoom siv kho qhov muag, uas txawv ntawm cov tsoos asphalt / polyurethane polishing. Hauv cov txheej txheem polishing ib txwm muaj, cov cuab yeej polishing feem ntau ua rau lub zog loj ntawm qhov chaw kho qhov muag, thaum Mr Polishing tshem tawm qhov chaw kho qhov muag nyob rau hauv cov kev taw qhia tangential, yog li Mr Polishing tsis hloov qhov qub sub-surface puas yam ntxwv ntawm qhov chaw kho qhov muag. Yog li ntawd, Mr Polishing tuaj yeem siv los txhuam qhov zawj ntawm qhov chaw kho qhov muag. Tom qab ntawd lub polishing cheeb tsam yog soj ntsuam los ntsuam xyuas qhov luaj li cas ntawm cov subsurface puas ntawm tus thawj optical nto.

d
a) Block gluing method

Txoj kev no kuj tau siv los ntsuas qhov kev puas tsuaj ntawm qhov chaw. Qhov tseeb, xaiv cov qauv square nrog tib cov duab thiab cov khoom siv, txhuam ob qhov chaw ntawm cov qauv, thiab tom qab ntawd siv cov nplaum nplaum nplaum rau ob lub ntsej muag polished ntawm cov qauv ua ke, thiab tom qab ntawd zom ob sab ntawm cov qauv ua ke ntawm tib yam. sij hawm. Tom qab kev sib tsoo, cov tshuaj reagents yog siv los cais cov qauv square. Qhov loj ntawm subsurface puas los ntawm kev sib tsoo theem tuaj yeem soj ntsuam los ntawm kev soj ntsuam qhov sib cais polished nto nrog lub tshuab tsom. Tus txheej txheem schematic daim duab ntawm txoj kev yog raws li nram no:

e

Schematic daim duab ntawm subsurface puas pom los ntawm thaiv nplaum txoj kev

Txoj kev no muaj qee yam kev txwv. Vim tias muaj cov nplaum nplaum, qhov xwm txheej ntawm cov nplaum nplaum yuav tsis muaj kev cuam tshuam qhov kev puas tsuaj ntawm cov khoom siv tom qab sib tsoo, yog li qhov ntsuas tau tsuas yog cuam tshuam qhov xwm txheej SSD rau qee yam.

a) Tshuaj etching

Txoj kev siv cov tshuaj tsim nyog los ua kom cov txheej txheem puas ntawm qhov chaw kho qhov muag. Tom qab cov txheej txheem yaig tiav lawm, qhov kev puas tsuaj ntawm cov av yog ntsuas los ntawm cov duab thiab qhov roughness ntawm cov khoom nto thiab qhov ntsuas qhov hloov ntawm qhov yaig. Feem ntau siv tshuaj reagents yog hydrofluoric acid (HF), ammonium hydrogen fluoride (NH4HF) thiab lwm yam corrosive agents.

b) Txoj kev hla ntu

Cov qauv no yog dissected thiab scanning electron microscope yog siv los saib xyuas qhov loj ntawm subsurface puas.

c) Dye impregnation txoj kev

Vim tias cov txheej txheej saum npoo av ntawm cov khoom siv kho qhov muag muaj ntau cov microcracks, dyes tuaj yeem tsim cov xim sib txawv nrog cov khoom siv kho qhov muag lossis sib piv nrog cov substrate tuaj yeem nias rau hauv cov khoom. Yog tias lub substrate muaj cov khoom siv tsaus, fluorescent dyes tuaj yeem siv tau. Kev puas tsuaj sub-deg tuaj yeem tshawb xyuas tau yooj yim optically lossis hluav taws xob. Vim tias cov kab nrib pleb feem ntau zoo heev thiab hauv cov khoom siv, thaum qhov tob tob ntawm cov xim nkag tsis txaus, nws yuav tsis sawv cev qhov tseeb qhov tob ntawm microcrack. Txhawm rau kom tau txais qhov tawg qhov tob kom raug raws li qhov ua tau, ntau txoj hauv kev tau thov rau impregnating dyes: mechanical prepressing thiab txias isostatic pressing, thiab siv electron sojntsuam microanalysis (EPMA) txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhav

B, txoj kev tsis muaj kev puas tsuaj

a) Txoj kev kwv yees

Txoj kev kwv yees tsuas yog kwv yees qhov tob ntawm qhov kev puas tsuaj raws li qhov loj ntawm qhov loj me ntawm cov khoom siv abrasive thiab qhov loj ntawm qhov roughness ntawm cov khoom. Cov kws tshawb fawb siv ntau qhov kev ntsuam xyuas los tsim kom muaj kev sib raug zoo ntawm qhov loj me ntawm cov khoom siv abrasive thiab qhov tob ntawm qhov kev puas tsuaj ntawm qhov chaw, nrog rau cov lus sib txuam ntawm qhov loj ntawm qhov roughness ntawm cov khoom thiab cov sub- nto kev puas tsuaj. Kev puas tsuaj subsurface ntawm cov khoom siv tam sim no tuaj yeem kwv yees los ntawm kev siv lawv cov ntawv sau.

b) Optical Coherence Tomography (OCT)

Optical coherence tomography, lub hauv paus ntsiab lus ntawm Michelson cuam tshuam, ntsuas cov ntaub ntawv ntsuas los ntawm kev cuam tshuam cov teeb liab ntawm ob lub teeb ntawm lub teeb. Cov txheej txheem no feem ntau yog siv los soj ntsuam cov ntaub so ntswg lom thiab muab kev sib tshuam tomography ntawm cov qauv subsurface ntawm cov ntaub so ntswg. Thaum OCT cov txheej txheem siv los soj ntsuam qhov kev puas tsuaj subsurface ntawm qhov chaw kho qhov muag, qhov ntsuas qhov ntsuas qhov ntsuas ntawm qhov ntsuas yuav tsum raug txiav txim siab kom tau txais qhov tseeb qhov tob tob. Txoj kev tuaj yeem tshaj tawm pom qhov tsis xws luag ntawm qhov tob ntawm 500μm nrog kev daws teeb meem ntsug zoo dua 20μm. Txawm li cas los xij, thaum nws siv rau SSD nrhiav pom cov khoom siv kho qhov muag, lub teeb pom kev los ntawm SSD txheej yog qhov tsis muaj zog, yog li nws nyuaj rau kev cuam tshuam. Tsis tas li ntawd, kev tawg ntawm qhov chaw yuav cuam tshuam rau kev ntsuas qhov ntsuas, thiab qhov ntsuas qhov tseeb yuav tsum tau txhim kho.

c) Laser scattering txoj kev

Laser irradiation ntawm qhov chaw photometric, siv cov khoom tawg ntawm lub laser los ntsuas qhov loj ntawm qhov kev puas tsuaj subsurface, kuj tau kawm ntau heev. Feem ntau suav nrog Total internal refection microscopy (TIRM), Confocal laser scanning microscopy (CLSM), thiab intersecting polarization confocal microscopy (CPCM). cross-polarization confocal microscopy, thiab lwm yam.

d) Scanning acoustic microscope

Scanning acoustic microscopy (SAM), raws li txoj kev kuaj xyuas ultrasonic, yog ib txoj kev kuaj tsis muaj kev puas tsuaj uas tau siv dav los kuaj xyuas qhov tsis xws luag. Txoj kev no feem ntau yog siv los ntsuas cov qauv nrog cov npoo du. Thaum qhov saum npoo ntawm cov qauv yog ntxhib heev, qhov ntsuas qhov tseeb yuav raug txo qis vim yog qhov cuam tshuam ntawm cov nplaim tawg tawg.

3 Subsurface puas tswj txoj kev

Nws yog peb lub hom phiaj kawg kom tswj tau qhov kev puas tsuaj subsurface ntawm cov khoom siv kho qhov muag thiab tau txais cov khoom uas tshem tawm SSDS tag. Nyob rau hauv ib txwm muaj xwm txheej, qhov tob ntawm sub-surface puas yog proportional rau qhov luaj li cas ntawm abrasive particle loj, qhov me me particle loj ntawm abrasive, qhov ntiav sub-surface puas, yog li ntawd, los ntawm kev txo cov granularity ntawm kev sib tsoo, thiab tag nrho. kev sib tsoo, koj tuaj yeem txhim kho qhov kev puas tsuaj ntawm sub-deg. Cov txheej txheem ua tiav ntawm kev tswj xyuas kev puas tsuaj rau hauv cov theem yog qhia hauv daim duab hauv qab no:

f

Kev puas tsuaj subsurface yog tswj nyob rau hauv theem
Thawj theem ntawm kev sib tsoo yuav tshem tawm tag nrho cov subsurface puas nyob rau hauv qhov chaw dawb paug thiab tsim ib tug tshiab subsurface nyob rau hauv no theem, thiab ces nyob rau hauv lub thib ob theem ntawm kev sib tsoo, nws yog tsim nyog los tshem tawm SSD generated nyob rau hauv thawj theem thiab tsim tshiab subsurface puas. dua, ua nyob rau hauv lem, thiab tswj cov particle loj thiab purity ntawm lub abrasive, thiab thaum kawg tau txais qhov kev cia siab ntawm optical nto. Qhov no kuj yog kev ua cov tswv yim uas kho qhov muag tau ua raws li ntau pua xyoo.

Tsis tas li ntawd, tom qab cov txheej txheem sib tsoo, pickling saum npoo ntawm cov khoom tuaj yeem tshem tawm qhov kev puas tsuaj ntawm qhov chaw, yog li txhim kho qhov zoo thiab txhim kho kev ua haujlwm.

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Ntxiv: Tsev 1, No.1558, txawj ntse txoj kev, qingbaijiang, chengdu, Sichuan, Suav teb


Lub sij hawm xa tuaj: Plaub Hlis-18-2024