Kuyesa kwa parameter ya filimu - transmittance ndi reflectivity

1 magwiridwe antchito pambuyo zokutira

M'nkhani yapitayi, tinayambitsa ntchito, mfundo, mapulogalamu opangira mapangidwe ndi njira zodziwika bwino zokutira za mafilimu owonda kwambiri. M'nkhaniyi, tikuyambitsa kuyesa kwa magawo a post-coating. Zomwe zimapangidwira pamwamba pa chigawocho pambuyo popaka zikuphatikizapo Transmittance (Transmittance), Reflectance (R), Absorptance (A), etc. Komanso, mayamwidwe (Transmittance) ndi zina zotero. Chikhalidwe chobalalika S (Scatter) cha filimuyi chiyeneranso kuyesedwa ndikuwunikidwa.
The transmittance T ndi chiŵerengero cha mphamvu ya kuwala yomwe imadutsa mufilimu kupita ku mphamvu yowunikira yomwe ikuchitika. Chiwonetsero cha R ndi chiŵerengero cha mphamvu yamphamvu yomwe imawonetsedwa ndi pamwamba pa zokutira ndi mphamvu zomwe zikuchitika. Mayamwidwe A ndi chiŵerengero cha mphamvu ya kuwala yomwe imatengedwa ndi filimuyo ndi mphamvu ya kuwala kwa chochitikacho. Pazigawo zitatu izi, maubale awa alipo:
T + R + A = 1

Ndiko kuti, chiwerengero cha transmittance, reflectivity ndi mayamwidwe a filimu wosanjikiza ndi mosalekeza 1. Izi zikutanthauza kuti pambuyo kuwala kuwala kudutsa nembanemba, mbali yake imadutsa, mbali yake ikuwonekera kutali, ndi zina zonse. imatengedwa ndi nembanemba.

Pachigawo cha kuwalazojambula, ma transmittance kapena reflectivity of the film surface is always required, ndipo spectral range and incidence Angle pansi pa application ikuyenera kufotokozedwa momveka bwino. Ngati polarization ikufunikanso, mitundu yosiyanasiyana ya polarization iyenera kufotokozedwa momveka bwino. Mwachitsanzo, zofunikira zokutira pachithunzi pansipa ndikuti pa 770nm, kuwunikira kuyenera kukhala kosachepera 88% pa 45 degree incidence, ndipo pa 550nm, transmittance sayenera kuchepera 70% pa 45 degree incidence.

a

Kuphatikiza pa zinthu zomwe zili pamwambazi, makina ndi mankhwala a filimu ya optical filimu iyeneranso kuganiziridwa, kuphatikizapo kukana kuvala, kulimba, kusungunuka kwa filimuyo. Komanso, khalidwe la kuwala pamwamba ❖ kuyanika kuyeneranso kuganiziridwa, kuphatikizapo zofunikira za pitting, zokopa, dothi, madontho, ndi zina zotero.
2 Mfundo ya spectrophotometer

Mu pepala ili, timayang'ana kwambiri za mawonekedwe a njira zoyesera filimu kuti tidziwitse, pochita, Spectrophotometer (Spectrophotometer) ndi Ellipsometer (Ellipsometer) kuyesa magawo a filimuyo, spectrophotometer imatha kuyesa kufalikira, kuwunikira komanso kuyamwa kwa mawonekedwe a kuwala. mankhwala. The ellipsometer imatha kuyeza makulidwe ndi mawonekedwe a polarization a filimu wosanjikiza, ndipo mfundo zonse ziwiri ndizofanana.
Mapangidwe a chipangizo choterocho akhoza kugawidwa m'magawo awiri a njira yopangira mtengo ndi njira yolandirira mtengo, pamene kufalikira kwa chigawocho kuyenera kuyesedwa, chigawocho chimayikidwa pakati pa njira ziwirizo, kuti mtengowo uwonongeke. imadutsa mu chitsanzo, pamene chiwonetsero cha chigawocho chiyenera kuyesedwa, chigawocho chimayikidwa kumbali imodzi ya njira ziwirizo, kuti mtengowo uwonetsedwe ndi chitsanzo. Mwachitsanzo, mfundo ya spectrophotometer kuyeza kufalikira kwa sampuli ikuwonetsedwa pachithunzi chotsatirachi:

b

M'chithunzi pamwambapa, kumanzere kumanzere ndi njira yopangira matabwa, pogwiritsa ntchito kuwala kwakukulu kwa sipekitiramu kuti atulutse kuwala, ndiyeno kupyolera mukugawanika kwa kabati ndi kusankha kagawo, kutulutsa kuwala kwinakwake kwa kuwala, mtengowo umadutsa. collimator 1, imakhala mtengo wophatikizika, kenako imadutsa polarizer yomwe imatha kuzungulira Angle, imakhala kuwala kwapolarized, ndipo kuwala kwapolarized kumagawidwa mu 2 mizati ndi spectroscope pambuyo collimator 2 atasonkhanitsidwa. Mtsinje wowala umawonetsedwa mu chowunikira chowunikira, pomwe kuwala komwe kunasonkhanitsidwa kumagwiritsidwa ntchito ngati chiwongolero chowongolera kusuntha kwa mphamvu chifukwa cha kusinthasintha kwa gwero la kuwala, ndipo kuwala kwina kumadutsa pachitsanzocho, kumapangidwanso ndi collimator 3 ndi collimator. 4, ndikulowetsa chowunikira kumapeto kwenikweni kwa mayeso. Pachiyeso chenichenicho, mphamvu ziwiri za mphamvu zimapezedwa mwa kuika ndi kutulutsa chitsanzo choyesedwa, ndipo kutumiza kwa chitsanzo kungapezeke poyerekezera mphamvu.
Mfundo ya ellipsometer ndi yofanana ndi mfundo ya spectrophotometer yomwe ili pamwambapa, kupatula kuti mbale yozungulira ya 1/4 imawonjezedwa ngati chinthu chamalipiro mu njira yotumizira mtengo ndi njira yolandirira, ndipo polarizer imawonjezedwa mu njira yolandirira. , kotero kuti maonekedwe a polarization a chitsanzo akhoza kufufuzidwa mosavuta. Nthawi zina, ellipsometer idzagwiritsanso ntchito mwachindunji gwero lalikulu la kuwala kwa sipekitiramu, ndikutenga slit ndi splitter spectrometer pamapeto olandira, kuphatikizapo chowunikira cha mzere, kuti akwaniritse kuyesa kwa chigawocho.
3. Mayeso a transmittance

Mu kuyesa kwa transmittance, pofuna kupewa chiwonetsero cha chowunikira chomwe chikulandira kuwala kwa kuwala, gawo lophatikizira limagwiritsidwa ntchito ngati wolandila, mfundoyi ikuwonetsedwa motere:

c

Monga tawonera pamwambapa, gawo lophatikizirali ndi gawo lozungulira lomwe limakutidwa ndi zokutira zoyera zowoneka bwino pakhoma lamkati, ndipo pali dzenje lazenera pakhoma la mpira, lomwe limagwiritsidwa ntchito ngati dzenje la kuwala kwa chochitikacho. ndi dzenje lolandira la chowunikira kuwala. Mwanjira iyi, kuwala komwe kumalowa mu gawo lophatikizana kumawonetsedwa kangapo kudzera mu zokutira zamkati zamkati, kupanga kuwala kofanana pakhoma lamkati, ndikulandiridwa ndi chowunikira.
Mwachitsanzo, mawonekedwe a chipangizo chomwe chimagwiritsidwa ntchito poyesa kufalikira kwa mbale ya optical chikuwonetsedwa pansipa

d

Pachithunzi pamwambapa, chitsanzo choyesedwa chimayikidwa pa tebulo lokonzekera lomwe lingathe kusinthidwa mu x ndi y. Kutumiza kwachitsanzo kungathe kuyesedwa pa malo aliwonse ndi makompyuta a tebulo lokonzekera. Kugawa kwagalasi lonse lathyathyathya kumatha kupezekanso poyesa kupanga sikani, ndipo kutsimikizika kwa mayeso kumatengera kukula kwa mtengowo.
4. Kuyesa kuwunikira

Pa kuyeza kwa chiwonetsero cha filimu ya optical, nthawi zambiri pamakhala njira ziwiri, imodzi ndi muyeso wachibale ndipo inayo ndi muyeso wathunthu. Njira yoyezera wachibale imafuna chonyezimira chodziwika bwino kuti chigwiritsidwe ntchito poyesa kuyerekeza. M'zochita, chiwonetsero cha galasi lowonetsera chiyenera kuyesedwa nthawi zonse ndi ukalamba kapena kuipitsidwa kwa filimuyo. Choncho, njirayi ili ndi zolakwika zomwe zingatheke muyeso. Njira yoyezera kuwunikira kwathunthu imafuna kuwongolera kuwunikira kwa chipangizo choyesera popanda kuyika chitsanzo. Pachithunzi chomwe chili pansipa, mawonekedwe a chipangizo cha VW chaperekedwa kuti akwaniritse muyeso wokwanira wa chiwonetsero cha chitsanzo:

e

Chithunzi chakumanzere mu chithunzi pamwambapa chikuwonetsa mawonekedwe a V opangidwa ndi magalasi atatu, M1, M2 ndi M3. Choyamba, kuchuluka kwamphamvu kwamtunduwu kumayesedwa ndikulembedwa ngati P1. Kenako, pachithunzi choyenera, chitsanzo chomwe chikuyesedwa chimayikidwa, ndipo galasi la M2 limazunguliridwa pamalo apamwamba kuti likhale lopangidwa ndi W. The reflectivity mtheradi wa chitsanzo kuyezedwa angapezeke. Chipangizochi chikhoza kusinthidwanso, mwachitsanzo, chitsanzo chomwe chikuyesedwa chimakhalanso ndi tebulo lozungulira lodziimira payekha, kotero kuti chitsanzo choyesedwa chikhoza kusinthidwa ku Angle iliyonse, pozungulira galasi la M2 ku malo owonetsera, kuti akwaniritse mtengo linanena bungwe, kotero kuti reflectivity wa chitsanzo akhoza kuyesedwa pa ngodya angapo.
Mwachitsanzo, mawonekedwe a chipangizo chomwe chimagwiritsidwa ntchito poyesa kuwunikira kwa mbale ya optical chikuwonetsedwa pansipa:

f

M'chithunzi pamwambapa, chitsanzo choyesedwa chimayikidwa pa tebulo losinthidwa la x / y, ndipo chiwonetsero cha chitsanzocho chikhoza kuyesedwa pa malo aliwonse kudzera pa makompyuta a tebulo lokonzekera. Kupyolera muyeso la sikani, mapu owonetsera owonetsera a galasi lonse lathyathyathya amathanso kupezeka.

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