1 Mfundo zamakanema owoneka bwino
M'nkhaniyi, tikuwonetsani mfundo za mafilimu opyapyala, omwe amagwiritsidwa ntchito kwambiri pakupanga mapulogalamu ndi teknoloji yokutira.
Mfundo yaikulu ya chifukwa chake mafilimu owoneka amatha kukwaniritsa ntchito zapadera monga anti-reflection, kuwonetsetsa kwakukulu kapena kugawanika kwa kuwala ndiko kusokoneza kwa filimu yopyapyala. Makanema owonda nthawi zambiri amapangidwa ndi gulu limodzi kapena angapo okhala ndi index yotsika kwambiri ya refractive index ndi magawo otsika a refractive index omwe amasinthidwa mosinthana. Zinthu zosanjikiza filimuzi nthawi zambiri zimakhala oxides, zitsulo kapena fluoride. Poika chiwerengero, makulidwe ndi zigawo zosiyana za filimu ya filimuyo, Kusiyana kwa refractive index pakati pa zigawo kungathe kulamulira kusokoneza kwa matabwa a kuwala pakati pa mafilimu kuti apeze ntchito zofunika.
Tiyeni titenge zokutira wamba zotsutsana ndi reflection monga chitsanzo kufotokoza chodabwitsa ichi. Kuti muwonjezere kapena kuchepetsa kusokoneza, makulidwe a kuwala kwa nsalu yotchinga nthawi zambiri ndi 1/4 (QWOT) kapena 1/2 (HWOT). Pachithunzi chomwe chili pansipa, chiwonetsero cha refractive cha sing'anga ya zochitika ndi n0, ndipo refractive index of the substrate ndi ns. Chifukwa chake, chithunzi cha refractive index ya zinthu zafilimu zomwe zitha kupangitsa kusokoneza zinthu zitha kuwerengedwa. Kuwala kowala komwe kumawonekera pamwamba pa filimuyi ndi R1, Kuwala kowala komwe kumawonetsedwa ndi pansi pa filimuyi ndi R2. Pamene makulidwe a kuwala kwa filimuyo ndi 1/4 wavelength, kusiyana kwa njira ya kuwala pakati pa R1 ndi R2 ndi 1/2 wavelength, ndipo zosokoneza zimakumana, motero zimapangitsa kusokoneza kosokoneza. Zodabwitsa.
Mwanjira iyi, kulimba kwa mtengo wowonekera kumakhala kochepa kwambiri, potero kukwaniritsa cholinga chotsutsa-reflection.
2 Optical woonda filimu kapangidwe mapulogalamu
Pofuna kuwongolera amisiri kupanga makina opanga mafilimu omwe amakwaniritsa ntchito zosiyanasiyana, mapulogalamu opangira mafilimu ocheperako apangidwa. Pulogalamu yamapangidwe imaphatikiza zida zomangira zomwe zimagwiritsidwa ntchito nthawi zambiri ndi magawo ake, kufananiza kosanjikiza kwa filimu ndi kukhathamiritsa ma aligorivimu ndi ntchito zowunikira, zomwe zimapangitsa kuti akatswiri azitha kupanga ndi kusanthula mosavuta. Machitidwe osiyanasiyana mafilimu. Mapulogalamu opanga mafilimu omwe amagwiritsidwa ntchito kwambiri ndi awa:
A.TFCalc
TFCalc ndi chida chapadziko lonse lapansi chopangira filimu yopyapyala komanso kusanthula. Ikhoza kugwiritsidwa ntchito popanga mitundu yosiyanasiyana ya anti-reflection, high-reflection, bandpass, spectroscopic, gawo ndi mafilimu ena. TFCalc imatha kupanga kanema wambali ziwiri pagawo laling'ono, lokhala ndi magawo 5,000 amafilimu pamalo amodzi. Imathandizira kutulutsa kwamitundu yambiri yamafilimu ndipo imatha kutsanzira mitundu yosiyanasiyana ya kuyatsa: monga matabwa a cone, mizati yowunikira mwachisawawa, ndi zina zambiri. Kachiwiri, pulogalamuyo imakhala ndi ntchito zina zokhathamiritsa, ndipo imatha kugwiritsa ntchito njira monga mtengo wopitilira muyeso ndi njira zosiyanasiyana kuti ziwongolere. reflectivity, transmittance, absorbance, phase, ellipsometry parameters ndi zolinga zina za filimuyi. Pulogalamuyi imaphatikizanso ntchito zosiyanasiyana zowunikira, monga reflectivity, transmittance, absorbance, ellipsometry parameter analysis, electric field intensity distribution curve, filimu yowonetsera mafilimu ndi kusanthula mtundu wa kufalitsa, kuwerengera kwa kristalo, kulolerana kwa filimu ndi kusanthula tcheru, kusanthula zokolola, etc. Mawonekedwe ogwiritsira ntchito a TFCalc ndi awa:
Mu mawonekedwe opareshoni awonetsedwa pamwambapa, polowetsa magawo ndi malire ndi kukhathamiritsa, mutha kupeza filimu yomwe ikugwirizana ndi zosowa zanu. Ntchitoyi ndi yosavuta komanso yosavuta kugwiritsa ntchito.
B. Essential Macleod
Essential Macleod ndi pulogalamu yathunthu yowunikira mafilimu komanso mapangidwe apulogalamu omwe ali ndi mawonekedwe enieni a zolemba zambiri. Itha kukwaniritsa zofunikira zosiyanasiyana pakupanga zokutira zowoneka bwino, kuyambira makanema osavuta osanjikiza amodzi mpaka makanema okhwima. , imathanso kuyesa zosefera za wavelength division multiplexing (WDM) ndi dense wavelength division multiplexing (DWDM). Ikhoza kupanga kuchokera pachiyambi kapena kukhathamiritsa zomwe zilipo kale, ndipo imatha kufufuza zolakwika pamapangidwewo. Ili ndi ntchito zambiri komanso yamphamvu.
Mawonekedwe apangidwe a pulogalamuyo akuwonetsedwa pachithunzi pansipa:
C. OptiLayer
Mapulogalamu a OptiLayer amathandizira njira yonse yamakanema owonda kwambiri: magawo - kapangidwe - kupanga - kusanthula kwa inversion. Zimaphatikizapo magawo atatu: OptiLayer, OptiChar, ndi OptiRE. Palinso laibulale ya OptiReOpt dynamic link (DLL) yomwe imatha kupititsa patsogolo ntchito zamapulogalamu.
OptiLayer imayang'ana ntchito yowunikira kuchokera pakupanga kupita ku chandamale, imakwaniritsa cholinga chokonzekera mwa kukhathamiritsa, ndikuwunika zolakwika zomwe zidapangidwa kale. OptiChar imayang'ana kusiyana pakati pa mawonekedwe owoneka bwino a zinthu zosanjikiza ndi mawonekedwe ake owoneka bwino pansi pazifukwa zosiyanasiyana zofunika mu chiphunzitso cha filimu yopyapyala, ndikupeza mawonekedwe abwinoko komanso owoneka bwino azinthu zosanjikiza komanso chikoka cha chinthu chilichonse pamapangidwe apano, kuwonetsa kugwiritsa ntchito zinthu zofunika kuziganizira popanga wosanjikiza wa zipangizo? OptiRE imayang'ana mawonekedwe owoneka bwino amtundu wopangidwira komanso mawonekedwe owoneka bwino amtundu womwe amayezedwa moyeserera pambuyo popanga. Kupyolera mu kusintha kwa uinjiniya, timapeza zolakwika zina zomwe zimapangidwa panthawi yopanga ndikuzibwezera kunjira yopangira kuti zitsogolere kupanga. Ma modules omwe ali pamwambawa akhoza kugwirizanitsidwa kudzera mu ntchito ya laibulale yowonjezereka, potero kuzindikira ntchito monga kupanga, kusinthidwa ndi kuyang'anira nthawi yeniyeni muzotsatira za ndondomeko kuchokera ku mapangidwe a mafilimu mpaka kupanga.
3 Ukadaulo wokutira
Malinga ndi njira zosiyanasiyana zokutira, zitha kugawidwa m'magulu awiri: ukadaulo wokutira wamankhwala ndiukadaulo wopaka thupi. Ukadaulo wokutira wa Chemical umagawika m'kumizidwa kumiza ndi kupaka utsi. Tekinolojeyi ndiyoyipitsa kwambiri komanso imakhala yosachita bwino pamakanema. Ikusinthidwa pang'onopang'ono ndi mbadwo watsopano wa teknoloji yokutira thupi. ❖ kuyanika thupi ikuchitika ndi zingalowe evaporation, ayoni plating, etc. Vacuum ❖ kuyanika ndi njira evaporating (kapena sputtering) zitsulo, mankhwala ndi zina filimu zipangizo mu zingalowe m'malo kuti pa gawo lapansi kuti TACHIMATA. M'malo opanda vacuum, zida zokutira zimakhala ndi zonyansa zochepa, zomwe zimatha kuletsa makutidwe ndi okosijeni pamtunda wazinthu ndikuthandizira kuwonetsetsa kuti filimuyo imakhala yofanana komanso makulidwe ake, motero imagwiritsidwa ntchito kwambiri.
Nthawi zonse, kupanikizika kwa 1 mumlengalenga kumakhala pafupifupi 10 ku mphamvu ya 5 Pa, ndipo kupanikizika kwa mpweya komwe kumafunika kuti kupaka vacuum nthawi zambiri kumakhala 10 ku mphamvu ya 3 Pa ndi pamwamba, yomwe ili ya zokutira za vacuum. Mu zokutira vacuum, pamwamba pa zigawo zowoneka bwino ziyenera kukhala zoyera kwambiri, kotero kuti chipinda chotulutsiramo panthawi yokonza chiyeneranso kukhala choyera kwambiri. Pakalipano, njira yopezera malo abwino ochotsera vacuum nthawi zambiri ndi kugwiritsa ntchito vacuuming. Mapampu ophatikizira mafuta, Pampu ya molekyulu kapena pampu ya condensation imagwiritsidwa ntchito kutulutsa vacuum ndikupeza malo otsekemera kwambiri. Pampu zoyatsira mafuta zimafuna madzi ozizira komanso mpope wochirikiza. Zili zazikulu kukula kwake ndipo zimawononga mphamvu zambiri, zomwe zingayambitse kuipitsidwa kwa njira yokutira. Mapampu a mamolekyu nthawi zambiri amafunikira pampu yothandizira kuti awathandize pantchito yawo ndipo ndi okwera mtengo. Mosiyana ndi zimenezi, mapampu a condensation samayambitsa kuipitsa. , sichifuna mpope wochirikiza, imakhala yogwira ntchito kwambiri komanso yodalirika, choncho ndiyoyenera kwambiri yokutira vacuum optical. Chipinda chamkati cha makina opaka vacuum wamba chikuwonetsedwa pachithunzichi:
Mu zokutira za vacuum, filimuyo iyenera kutenthedwa kuti ikhale yopanda mpweya ndikuyiyika pamwamba pa gawo lapansi kuti ipange filimu yosanjikiza. Malinga ndi njira zosiyanasiyana zokutira, zitha kugawidwa m'mitundu itatu: kutentha kwa evaporation, kutentha kwa sputtering ndi plating ion.
Kutentha kwa kutentha kwa mpweya nthawi zambiri kumagwiritsa ntchito waya wotsutsa kapena kulowetsedwa kwafupipafupi kutenthetsa crucible, kotero kuti filimu yomwe ili mu crucible imatenthedwa ndi kutenthedwa kuti ipange zokutira.
Kutentha kwa sputtering kumagawidwa m'mitundu iwiri: Kutentha kwa ion mtengo sputtering ndi kutentha kwa magnetron sputtering. Kutentha kwa ion sputtering kumagwiritsa ntchito mfuti ya ion kutulutsa mtengo wa ion. Mtengo wa ion umawombera chandamale pamalo enaake ndikutulutsa pamwamba pake. maatomu, omwe amayika pamwamba pa gawo lapansi kuti apange filimu yopyapyala. Choyipa chachikulu cha sputtering ya ayoni ndikuti malo omwe aphulitsidwa pamalo omwe chandamale ndi ochepa kwambiri ndipo kuchuluka kwa ma ayoni nthawi zambiri kumakhala kotsika. Kutentha kwa Magnetron sputtering kumatanthauza kuti ma elekitironi amathamangira ku gawo lapansi pogwira ntchito yamagetsi. Panthawi imeneyi, ma electron amawombana ndi ma atomu a mpweya wa argon, omwe amachititsa kuti ma ion a argon ndi ma electron. Ma electron amawulukira ku gawo lapansi, ndipo ma argon ions amatenthedwa ndi gawo lamagetsi. Cholingacho chikufulumizitsidwa ndikuponyedwa mabomba pansi pa zomwe chandamale chikuchita, ndipo maatomu osalowerera ndale mu chandamale amaikidwa pa gawo lapansi kuti apange filimu. Magnetron sputtering amadziwika ndi kuchuluka kwa mapangidwe a filimu, kutentha kwapansi kwa gawo lapansi, kumamatira bwino kwa filimu, ndipo kumatha kukwaniritsa zokutira zazikulu.
Kuyika kwa ion kumatanthawuza njira yomwe imagwiritsa ntchito kutuluka kwa gasi kuti isungunuke pang'ono gasi kapena zinthu zomwe zatuluka nthunzi, ndikuyika zinthu zomwe zatuluka nthunzi pagawo laling'ono pophulitsidwa ndi ma ion a gasi kapena ma ion azinthu zotuluka nthunzi. ion plating ndi kuphatikiza kwa vacuum evaporation ndi ukadaulo wa sputtering. Zimaphatikiza ubwino wa evaporation ndi sputtering ndipo zimatha kuvala ma workpieces ndi mafilimu ovuta.
4 Mapeto
M'nkhaniyi, tikuyamba kufotokoza mfundo zoyambirira za mafilimu opangidwa ndi kuwala. Poika chiwerengero ndi makulidwe a filimuyo ndi kusiyana kwa refractive index pakati pa zigawo zosiyana za filimu, tikhoza kukwaniritsa kusokoneza kwa kuwala kwa kuwala pakati pa filimuyi, potero kupeza ntchito yofunikira ya Mafilimu. Nkhaniyi imayambitsa mapulogalamu opangira mafilimu omwe amagwiritsidwa ntchito kwambiri kuti apatse aliyense chidziwitso choyambirira cha kapangidwe kakanema. Mu gawo lachitatu la nkhaniyi, timapereka chidziwitso chatsatanetsatane cha teknoloji yokutira, kuyang'ana pa teknoloji yophimba vacuum yomwe imagwiritsidwa ntchito kwambiri pochita. Ndikukhulupirira kuti powerenga nkhaniyi, aliyense amvetsetsa bwino zokutira zowoneka bwino. M'nkhani yotsatira, tidzagawana njira yoyesera yokutira ya zigawo zowonongeka, choncho khalani maso.
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Nthawi yotumiza: Apr-10-2024
