1 Ibipimo byimikorere nyuma yo gutwikira
Mu kiganiro cyabanjirije iki, twerekanye imikorere, amahame, porogaramu yo gushushanya hamwe nubuhanga busanzwe bwo gutwika bwa firime nziza. Muri iyi ngingo, turamenyekanisha ikizamini cyibipimo byanyuma. Imikorere yimiterere yubuso bwibigize nyuma yo gutwikira harimo Transmittance (Transmittance), Kugaragaza (R), Absorptance (A), nibindi, Byongeye, kwinjiza (Transmittance) nibindi. Gutatanya biranga S (Scatter) yubuso bwa firime nabyo bigomba kugeragezwa no gusesengurwa.
Ikwirakwizwa rya T ni igipimo cyingufu zumucyo zinyura muri firime ningufu zumucyo zabaye. Kugaragaza R ni igipimo cyingufu zingufu zigaragazwa nubuso bwa coating ningufu zibyabaye. Absorption A ni igipimo cyingufu zumucyo zinjizwa nigice cya firime ningufu zumucyo zabaye. Kuri ibi bipimo bitatu, umubano ukurikira urahari:
T + R + A = 1
Nukuvuga ko igiteranyo cyogukwirakwiza, kugaragariza no kwinjiza ibice bya firime bihoraho 1. Ibi bivuze ko nyuma yumucyo wumucyo unyuze muri membrane, igice cyacyo kikaba cyaranyuze, igice cyacyo kikagaragara kure, naho ibindi ni Byinjijwe na membrane.
KuriIbikoresho byizaIgishushanyo, ihererekanyabubasha cyangwa kwerekana ubuso bwa firime mubisanzwe birasabwa, kandi urutonde rwikigereranyo hamwe nimpanuka Inguni munsi ya leta isabwa igomba gusobanurwa neza. Niba polarisiyasi nayo isabwa, intera ya polarisiyasi igomba gusobanurwa neza. Nkurugero, ibisabwa byo gutwikirwa mubishushanyo bikurikira ni uko kuri 770nm, imurikagurisha ntigomba kuba munsi ya 88% mugihe cya dogere 45, naho 550nm, kwanduza bigomba kuba munsi ya 70% mugihe cya dogere 45.
Usibye imiterere ya optique yavuzwe haruguru, imiterere ya mashini na chimique ya firime optique nayo igomba kwitabwaho, harimo kwihanganira kwambara, gukomera, gukomera kwa firime. Byongeye kandi, ubwiza bwubuso bwa optique nyuma yo gutwikira nabwo bugomba gusuzumwa, harimo ibisabwa mu gutobora, gushushanya, umwanda, irangi, nibindi.
2 Ihame rya spekitifotometero
Muri iyi nyandiko, turibanda kumiterere ya optique yuburyo bwo gupima firime kugirango tumenye, mubikorwa, Spectrophotometer nyamukuru (Spectrophotometer) na Ellipsometer (Ellipsometer) kugirango dusuzume ibipimo bya firime, spekitifotometero irashobora gupima ihererekanyabubasha, kwerekana no kwinjiza ibintu biranga optique ibicuruzwa. Ellipsometero irashobora gupima ubunini nuburinganire bwimiterere ya firime, kandi ihame ryombi rirasa.
Imiterere yiki gikoresho irashobora kugabanywamo ibice bibiri byumuyoboro wibisekuruza hamwe numuyoboro wakira urumuri, mugihe ihererekanyabubasha rigomba kugeragezwa, ibice bigashyirwa hagati yimiyoboro yombi, kugirango urumuri inyura mu cyitegererezo, iyo kugaragariza ibice bigomba kugeragezwa, ibice bishyirwa kuruhande rumwe rw'imiyoboro yombi, kugirango urumuri rugaragazwa nicyitegererezo. Nkurugero, ihame rya spekitifotometero yo gupima ihererekanyabubasha ryerekanwa mubishusho bikurikira:
Mu gishushanyo kiri hejuru, impera y’ibumoso ni umuyoboro w’ibisekuru, ukoresheje urumuri rugari rutanga urumuri rwohereza urumuri, hanyuma unyuze mu kugabana urusyo no guhitamo ibice, bisohora uburebure bwihariye bwurumuri, urumuri runyura collimator 1, ihinduka urumuri rwegeranijwe, hanyuma ikanyura muri polarizeri ishobora kuzenguruka Inguni, ihinduka urumuri rwa polarisiyasi, kandi urumuri rwa polarize rugabanyijemo ibiti 2 na spekitroscope nyuma yo gukusanya 2. Urumuri rumuri rugaragarira mubyerekanwe, aho urumuri rwegeranijwe rukoreshwa nkurwego rwo gukosora ingufu zatewe n’imihindagurikire y’isoko ry’umucyo, naho urundi rumuri runyura mu cyitegererezo, rusubirwamo na collimator 3 na collimator. 4, kandi yinjira muri detector kuruhande rwiburyo bwikizamini. Mu kizamini nyirizina, indangagaciro zibiri ziboneka mugushiramo no gufata icyitegererezo cyapimwe, kandi ihererekanyabubasha rishobora kuboneka mugereranije ingufu.
Ihame rya ellipsometero risa nihame rya spekitifotometero yavuzwe haruguru, usibye ko icyapa kizunguruka cya 1/4 cyongeweho nkibintu byindishyi mumurongo wohereza umurongo hamwe numuyoboro wakira, kandi polarizer nayo yongewe kumuyoboro wakira , kugirango polarisiyonike iranga sample irashobora gusesengurwa byoroshye. Rimwe na rimwe, ellipsometero nayo izakoresha mu buryo butaziguye urumuri rwinshi rw'umucyo, kandi ifate ibice na spitrometrike ya sprometrike ku iherezo ryakiriwe, ihujwe n'umurongo ugaragara, kugira ngo ugere ku kizamini cy'ibigize.
3. Ikizamini cyo kohereza
Mu kizamini cyo kohereza, mu rwego rwo kwirinda kugaragariza disiketi yakira urumuri, urumuri rwo guhuza akenshi rukoreshwa nk'uwakira, ihame ryerekanwa ku buryo bukurikira:
Nkuko bigaragara kuri iyi shusho yavuzwe haruguru, urwego rwuzuzanya ni uruzitiro rwometseho ibintu byera byera byerekana urukuta rw'imbere, kandi hari umwobo w'idirishya ku rukuta rw'umupira, rukoreshwa nk'umwobo w'urumuri rw'ibyabaye. n'umwobo wo kwakira icyuma kimurika. Muri ubu buryo, urumuri rwinjira murwego rwo guhuza rugaragarira inshuro nyinshi binyuze murukuta rwimbere, rukora urumuri rumwe kurukuta rwimbere, kandi rwakirwa na detector.
Nkurugero, imiterere yigikoresho gikoreshwa mugupima ihererekanyabubasha rya plaque optique irerekanwa hepfo
Mu gishushanyo kiri hejuru, icyitegererezo cyageragejwe gishyirwa kumeza yoguhindura ishobora kwimurwa mubyerekezo x na y. Ihererekanyabubasha ryikitegererezo rishobora kugeragezwa kumwanya uwariwo wose ukoresheje mudasobwa igenzura imbonerahamwe. Ikwirakwizwa rya transmitance yikirahure cyose kirashobora kandi kuboneka mugupima ibizamini, kandi gukemura ikizamini biterwa nubunini bwibiti.
4. Ikizamini cyo gutekereza
Kubipimo bya optique ya firime optique, mubisanzwe hariho inzira ebyiri, imwe ni igipimo ugereranije naho ubundi ni igipimo cyuzuye. Uburyo bwo gupima bugereranije busaba icyerekezo gifite imenyekanisha rizwi gukoreshwa nkibisobanuro byo kugereranya. Mu myitozo, kwerekana indorerwamo yerekanwe bigomba guhora bihindagurika buri gihe hamwe no gusaza cyangwa kwanduza urwego rwa firime. Kubwibyo, ubu buryo bufite amakosa yo gupima. Uburyo bwo gupima ibintu byuzuye bisaba kalibrasi yerekana ibintu byikizamini udashyizeho icyitegererezo. Mu gishushanyo gikurikira, imiterere yigikoresho cya kera cya VW gitangwa kugirango tugere ku gipimo cyuzuye cyo kwerekana urugero:
Igishushanyo cyibumoso mumashusho yavuzwe haruguru cyerekana imiterere ya V igizwe nindorerwamo eshatu, M1, M2 na M3. Ubwa mbere, umucyo mwinshi agaciro murubu buryo urageragezwa kandi ukandikwa nka P1. Hanyuma, mubishushanyo biboneye, icyitegererezo kiri munsi yikizamini gishyirwa, kandi indorerwamo ya M2 irazunguruka kumwanya wo hejuru kugirango ibe imiterere ya W. Kugaragaza byimazeyo urugero rwapimwe rushobora kuboneka. Iki gikoresho nacyo gishobora kunozwa, kurugero, icyitegererezo kiri munsi yikizamini nacyo gifite imbonerahamwe yigenga izunguruka, kugirango icyitegererezo kiri munsi yikizamini gishobora kuzunguruka kuri Angle iyo ari yo yose, mukuzenguruka indorerwamo ya M2 kumwanya uhuye, kugirango ugere kuri ibisohoka bisohoka, kugirango ibyerekanwe byurugero bishobora kugeragezwa kumpande nyinshi.
Nkurugero, imiterere yigikoresho gikoreshwa mugupima ububobere bwa plaque optique irerekanwa hepfo:
Mu gishushanyo kiri hejuru, icyitegererezo cyageragejwe gishyirwa kumeza ya x / y ibisobanuro byahinduwe, kandi ibyerekanwa byintangarugero birashobora kugeragezwa kumwanya uwariwo wose ukoresheje mudasobwa igenzura imbonerahamwe. Binyuze mu kizamini cyo gusikana, ikarita yo gukwirakwiza ibirahuri byose birashobora kuboneka.
Twandikire:
Email:jasmine@pliroptics.com ;
Terefone / Whatsapp / Wechat: 86 19013265659
urubuga ： www.pliroptics.com
Ongeraho: Kubaka 1, No.1558, umuhanda wubwenge, qingbaijiang, chengdu, sichuan, china
Igihe cyo kohereza: Apr-23-2024
