1 Amahame ya firime optique
Muri iki kiganiro, tuzagaragaza amahame ya optique yoroheje ya firime, ikoreshwa cyane muburyo bwa software hamwe nubuhanga bwo gutwikira.
Ihame shingiro ryimpamvu firime optique ishobora kugera kubikorwa byihariye nka anti-reaction, kugaragariza cyane cyangwa kugabana urumuri ni firime yoroheje ya firime. Amafirime mato asanzwe agizwe nitsinda rimwe cyangwa byinshi byurwego rwo hejuru rwerekana ibintu byoroheje kandi byerekana ibintu bike byerekana ibintu bisimburana. Ibikoresho bya firime mubisanzwe ni oxyde, ibyuma cyangwa fluoride. Mugushiraho umubare, ubunini hamwe nuburyo butandukanye bwa firime ya firime, Itandukaniro ryurutonde rwo kwanga hagati yurwego rushobora kugenzura guhuza urumuri rwumucyo hagati ya firime kugirango ubone imirimo isabwa.
Reka dufate urugero rusanzwe rwo kurwanya-kwigaragaza nkurugero rwo kwerekana iki kintu. Kugirango ugabanye cyangwa ugabanye kwivanga, uburebure bwa optique bwurwego rusanzwe ni 1/4 (QWOT) cyangwa 1/2 (HWOT). Mu gishushanyo gikurikira, indangagaciro yo kugabanya ibyabaye ni n0, naho indangantego ya substrate ni ns. Kubwibyo, ishusho yerekana indangantego yibikoresho bya firime ishobora kubyara interineti ihagarikwa rishobora kubarwa. Urumuri rumuri rugaragazwa nubuso bwo hejuru bwa firime ni R1, Urumuri rumuri rugaragazwa nubuso bwo hasi bwa firime ni R2. Iyo uburebure bwa optique ya firime ari 1/4 cyumurambararo, itandukaniro ryinzira ya optique hagati ya R1 na R2 ni 1/2 cyumurambararo, kandi ibihe byo guhuza byujujwe, bityo bikabyara kwivanga kwangiza. Fenomenon.
Muri ubu buryo, ubukana bwurumuri rugaragara buba buto cyane, bityo ukagera ku ntego yo kurwanya ibitekerezo.
Porogaramu nziza ya firime nziza
Mu rwego rwo korohereza abatekinisiye gukora sisitemu ya firime yujuje imirimo itandukanye, hashyizweho porogaramu yoroheje ya firime. Igishushanyo mbonera gihuza ibikoresho bisanzwe bikoreshwa hamwe nibipimo byabyo, kwigana firime ya firime no guhuza algorithm hamwe nibikorwa byo gusesengura, byorohereza abatekinisiye kwiteza imbere no gusesengura. Sisitemu zitandukanye. Porogaramu ikoreshwa muri firime ikoreshwa muburyo bukurikira:
A.TFCalc
TFCalc nigikoresho rusange cyo gukora optique yoroheje ya firime no gusesengura. Irashobora gukoreshwa mugushushanya ubwoko butandukanye bwo kurwanya-kugaragariza, kwerekana-hejuru, kwambukiranya, spekitroscopique, icyiciro nubundi buryo bwa firime. TFCalc irashobora gushushanya sisitemu ya firime yibice bibiri kuri substrate, hamwe na firime zigera ku 5000 kumurongo umwe. Ifasha kwinjiza ama formulaire ya firime kandi irashobora kwigana ubwoko butandukanye bwamatara: nkibiti bya cone, imirasire yimirasire idasanzwe, nibindi. Icya kabiri, software ifite ibikorwa bimwe na bimwe byo gutezimbere, kandi irashobora gukoresha uburyo nkigiciro cyinshi nuburyo butandukanye kugirango uhindure neza kwigaragaza, guhererekanya, kwinjiza, icyiciro, ibipimo bya ellipsometrie nibindi bigamije sisitemu ya firime. Porogaramu ihuza ibikorwa bitandukanye byo gusesengura, nko kwerekana, guhererekanya, kwinjiza, gusesengura ibipimo bya ellipsometrie, gukwirakwiza ingufu z'umuriro w'amashanyarazi, kugaragariza sisitemu ya firime no gusesengura amabara, kubara umurongo wo kugenzura umurongo, kubara ibice bya firime no kwihanganira, gusesengura umusaruro, n'ibindi. Imikorere yimikorere ya TFCalc nuburyo bukurikira:
Mumikorere yimikorere yerekanwe hejuru, mugushyiramo ibipimo nibisabwa imipaka no guhitamo neza, urashobora kubona sisitemu ya firime ijyanye nibyo ukeneye. Igikorwa kiroroshye kandi cyoroshye gukoresha.
B. Ibyingenzi
Ibyingenzi Macleod nisesengura ryuzuye rya firime ya optique hamwe nubushakashatsi bwa software hamwe nukuri kwinyandiko-mikorere nyayo. Irashobora kuzuza ibisabwa bitandukanye mugushushanya neza, uhereye kumafirime yoroshye ya firime imwe kugeza kuri firime zikomeye. , irashobora kandi gusuzuma igabanywa ryumurongo wo kugwiza (WDM) hamwe nubucucike bwikwirakwizwa ryinshi (DWDM) muyunguruzi. Irashobora gushushanya guhera cyangwa guhuza ibishushanyo bihari, kandi irashobora gukora ubushakashatsi mubishushanyo mbonera. Ikungahaye kumikorere kandi ikomeye.
Igishushanyo mbonera cya software cyerekanwe ku gishushanyo gikurikira:
C. OptiLayer
Porogaramu ya OptiLayer ishyigikira inzira yose ya optique yoroheje: ibipimo - igishushanyo - umusaruro - gusesengura inversion. Harimo ibice bitatu: OptiLayer, OptiChar, na OptiRE. Hariho na OptiReOpt dinamike ihuza isomero (DLL) rishobora kuzamura imikorere ya software.
OptiLayer isuzuma imikorere yisuzuma kuva igishushanyo kugeza ku ntego, igera ku gishushanyo mbonera binyuze mu gutezimbere, kandi ikora isesengura ryamakosa yabanjirije umusaruro. OptiChar isuzuma itandukaniro riri hagati yimiterere yibintu byerekanwe hamwe nibipimo byayo byapimwe mubintu bitandukanye byingenzi mubitekerezo bya firime yoroheje, kandi ikabona icyitegererezo cyiza kandi gifatika hamwe ningaruka za buri kintu kubishushanyo mbonera, byerekana ikoreshwa Niki ibintu bigomba kwitabwaho mugushushanya iki gikoresho? OptiRE isuzuma ibiranga ibintu byerekana imiterere yubushakashatsi hamwe nibiranga icyitegererezo cyapimwe mubigeragezo nyuma yumusaruro. Binyuze mubikorwa bya injeniyeri, tubona amakosa amwe yatanzwe mugihe cyumusaruro hanyuma tukagaburira inzira yumusaruro kugirango tuyobore umusaruro. Module yavuzwe haruguru irashobora guhuzwa binyuze mumikorere yububiko bwibitabo bwibikorwa, bityo ukamenya ibikorwa nkibishushanyo mbonera, guhindura no kugenzura igihe nyacyo murukurikirane rwibikorwa kuva mubishushanyo bya firime kugeza mubikorwa.
3 Ikoreshwa rya tekinoroji
Ukurikije uburyo butandukanye bwo gusasa, irashobora kugabanywamo ibyiciro bibiri: tekinoroji yo gutwika imiti nubuhanga bwo gutwikira umubiri. Ubuhanga bwo gutwika imiti bugabanijwemo ibice byo kwibiza no gutera spray. Iri koranabuhanga riranduye cyane kandi rifite imikorere mibi ya firime. Igenda isimburwa buhoro buhoro nigisekuru gishya cya tekinoroji yo gutwikira umubiri. Ipfunyika ryumubiri rikorwa no guhumeka vacuum, isahani ya ion, nibindi. Ipfunyika Vacuum nuburyo bwo guhumeka (cyangwa gusohora) ibyuma, ibivanze nibindi bikoresho bya firime mumyuka kugirango ubishyire kuri substrate kugirango bisizwe. Mugihe cyimyuka, ibikoresho byo gutwikira bifite umwanda muke, bishobora gukumira okiside yubuso bwibintu kandi bigafasha kwemeza uburinganire bwimiterere nubunini bwa firime, bityo ikoreshwa cyane.
Mubihe bisanzwe, umuvuduko wikirere 1 ugera kuri 10 kugeza kuri 5 Pa, naho umuvuduko wumwuka ukenerwa mugutwikira vacuum muri rusange ni 10 kuri power ya 3 Pa no hejuru, ibyo bikaba bifitemo icyuho kinini. Mu gutwikira vacuum, hejuru yibigize optique bigomba kuba bifite isuku cyane, bityo icyumba cya vacuum mugihe cyo gutunganya nacyo kigomba kuba gifite isuku cyane. Kugeza ubu, inzira yo kubona ibidukikije bisukuye muri rusange ni ugukoresha vacuuming. Amapompo yo gukwirakwiza amavuta, pompe ya molekile cyangwa pompe ikoreshwa mugukuramo icyuho no kubona ibidukikije byinshi. Amavuta yo gukwirakwiza amavuta akenera amazi akonje na pompe yinyuma. Ninini mubunini kandi ikoresha ingufu nyinshi, bizatera umwanda murwego rwo gutwikira. Amapompe ya molekulari asaba pompe yinyuma kugirango ifashe mumirimo yabo kandi ihenze. Ibinyuranye, pompe ya kondegene ntabwo itera umwanda. , ntisaba pompe yinyuma, ifite imikorere ihanitse kandi yizewe neza, kubwibyo rero irakwiriye cyane kuri optique ya vacuum. Icyumba cyimbere cyimashini isanzwe ya vacuum irerekanwa mumashusho hepfo:
Mu cyuho cya vacuum, ibikoresho bya firime bigomba gushyukwa kuri gaze hanyuma bigashyirwa hejuru yubutaka kugirango habeho firime. Ukurikije uburyo butandukanye bwo gufata amasahani, irashobora kugabanywamo ubwoko butatu: gushyushya ubushyuhe bwumuriro, gushyushya ibintu hamwe no gufata ion.
Ubushyuhe bwo gushyushya ubushuhe busanzwe bukoresha insinga zo kurwanya cyangwa kwinjiza inshuro nyinshi kugirango ushushe ingenzi, kuburyo ibikoresho bya firime mubikonjo bishyuha kandi bigahinduka umwuka kugirango bibe igifuniko.
Gushyushya gusohora bigabanijwemo ubwoko bubiri: gushyushya ion beam gushuha no gushyushya magnetron. Ubushyuhe bwa Ion beam bushyushya bukoresha imbunda ya ion kugirango isohore urumuri rwa ion. Ion beam irasa igitego kumurongo runaka wabaye hanyuma igasohoka hejuru yacyo. atome, ibika hejuru yubutaka kugirango ikore firime yoroheje. Ingaruka nyamukuru ziterwa na ion beam ni uko agace katewe hejuru yintego ari nto cyane kandi igipimo cyo kubitsa ni gito. Ubushyuhe bwa Magnetron busobanura ko electron yihuta yerekeza kuri substrate munsi yumurima wamashanyarazi. Muri iki gikorwa, electron zihura na atome ya gaz ya argon, ionizing umubare munini wa argon ion na electron. Electron iguruka yerekeza kuri substrate, kandi ion ya argon ishyutswe numuriro w'amashanyarazi. Intego irihuta kandi igaterwa ibisasu munsi yintego yintego, kandi atome zidafite aho zibogamiye muri intego zashyizwe kuri substrate kugirango zikore firime. Imashini ya Magnetron irangwa nigipimo kinini cyo gukora firime, ubushyuhe buke bwa substrate, ifata neza ya firime, kandi irashobora kugera kubutaka bunini.
Isahani ya Ion bivuga uburyo bukoresha imyuka ya gazi kugirango igice cya ionize igice cyangwa ibintu bigahumuka, kandi bigashyira ibintu byahumetse kuri substrate munsi y’ibisasu bya ion cyangwa gaze ya ioni. Isahani ya Ion ni ihuriro ryimyuka ya vacuum na tekinoroji ya sputtering. Ihuza ibyiza byo guhumeka no gusohora kandi irashobora gutwika ibihangano hamwe na sisitemu ya firime igoye.
4 Umwanzuro
Muri iyi ngingo, tubanze tumenye amahame shingiro ya firime optique. Mugushiraho umubare nubunini bwa firime hamwe no gutandukanya indangantego yo kwanga hagati ya firime zitandukanye, turashobora kugera ku guhuza imirishyo yumucyo hagati ya firime, bityo tukabona imikorere ya firime isabwa. Iyi ngingo noneho itangiza porogaramu ikoreshwa ya firime ikunze gukoreshwa kugirango buri wese yumve neza ibishushanyo mbonera bya firime. Mugice cya gatatu cyingingo, turatanga intangiriro irambuye kubijyanye na tekinoroji yo gutwikira, twibanze ku ikoranabuhanga rya vacuum rikoreshwa cyane mubikorwa. Nizera ko mugusoma iyi ngingo, buriwese azasobanukirwa neza nububiko bwiza. Mu kiganiro gikurikira, tuzasangira uburyo bwo gupima ibipfukisho byibice bisize, komeza ukurikirane.
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Ongeraho: Kubaka 1, No.1558, umuhanda wubwenge, qingbaijiang, chengdu, sichuan, china
Igihe cyo kohereza: Apr-10-2024