Kukuvadzwa kwepasi pezvinhu zve optical

1 Tsanangudzo uye zvikonzero zvekukuvadza kwepasi pevhu

Iyo Sub-yepamusoro kukuvadzwa kwezvinhu zvemaziso (SSD, sub-surface kukuvara) inowanzotaurwa mune yakakwira-chaiyo optical application seyakanyanya laser masisitimu uye lithography michina, uye kuvepo kwayo kunodzivirira iko kwekupedzisira kugadzirisa iko kurongeka kwezvinhu zvemaziso uye kunowedzera kukanganisa kufungidzira. kushanda kwe optical systems, saka inoda kubhadharwa zvakakwana. Kukuvadzwa kwepasi pevhu kunowanzo kuratidzirwa nekutsemuka mukati mepamusoro pechinhu uye mukati mekushushikana maseru, ayo anokonzerwa nekumwe kusara kwekupatsanurwa uye deformation yekuumbwa kwezvinhu munzvimbo iri pedyo. Iyo subsurface yekukuvadzwa modhi inoratidzwa sezvizvi: iyo yekumusoro layer ndiyo yakakwenenzverwa sediment layer, uye ipapo iyo crack defect layer uye stress deformation layer ndiyo yepasi layer, uye iyo material layer isina kukuvara ndiyo yemukati-kati. Pakati pazvo, iyo crack defect layer uye stress deformation layer ndeye subsurface kukuvara.

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Subsurface kukuvara modhi ye optical materials

Optical zvikamu zvezvinhu zvinowanzoita girazi, ceramics uye zvimwe zvakaoma uye brittle zvinhu, mukutanga kugadzirisa nhanho yezvikamu, zvinoda kuenda kuburikidza nekugaya, kugaya zvakanaka uye rough polishing maitiro, mune aya maitiro, mechanic kugaya uye kemikari maitiro aripo. uye tamba basa. Iyo abrasive kana abrasive chishandiso chakabatana nepamusoro pechinhu chine hunhu hwehusina kuenzana saizi, uye simba renzvimbo yega yega yekusangana pamusoro peiyo element haina yunifomu, saka iyo convex uye concave layer uye yemukati crack layer ichaita. kugadzirwa pamusoro pegirazi pamusoro. Zvinhu zviripo mumucheka wakatsemuka ndicho chikamu chakaputsika panguva yekukuya, asi haina kudonha kubva pamusoro, saka kukuvara kwepasi-pasi kuchaumbwa. Kungave kuri abrasive kugaya kwezvimedu zvakasununguka kana CNC kugaya, chiitiko ichi chinogadzirwa pamusoro pechinhu. Mhedzisiro chaiyo yekukuvara kwepasi-pasi inoratidzwa mumufananidzo unotevera:

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Subsurface kukuvara kwekupa

2 Subsurface kukanganisa kuyera nzira

Sezvo kukuvara kwepasi-pasi hakugone kufuratirwa, inofanirwa kudzorwa zvinobudirira nevagadziri vechikamu chemaziso. Kuti unyatso kudzora, zvinodikanwa kunyatso ziva uye kuona ukuru hwekukuvadzwa kwepasi pevhu pamusoro pechikamu, kubva pakutanga kwezana ramakore rapfuura, vanhu vakagadzira nzira dzakasiyana dzekuyera uye kuongorora ukuru. yekukuvadzwa kwepasi pechikamu, maererano nemaitiro ehuwandu hwekufurira pane optical component, inogona kugoverwa muzvikamu zviviri: chiyero chinoparadza uye chiyero chisingaiti (chisina-kuparadza kuedza).

Inoparadza nzira yekuyera, sekureva kunoita zita, iko kudikanwa kwekushandura chimiro chepamusoro chechinhu che optical, kuitira kuti kukuvara kwepasi-pasi kusiri nyore kuona kuonekwe, wobva washandisa microscope nezvimwe zviridzwa kuti utarise. nzira yokuyera nayo, nzira iyi inowanzotora nguva, asi mibairo yayo yekuyera yakavimbika uye yakarurama. Nzira dzekuyera dzisiri dzekuparadza, dzisingakonzere kuwedzera kukuvadza kune chikamu chepamusoro, shandisa mwenje, ruzha, kana mamwe mafungu emagetsi kuona nzvimbo yekukuvadzwa kwepasi, uye kushandisa huwandu hwekuchinja kwezvivakwa kwaanoitika muchikamu kuti utarise saizi ye. iyo SSD, nzira dzakadai dziri nyore uye dzinokurumidza, asi kazhinji imhando yekutarisa. Zvinoenderana neiyo kupatsanurwa, nzira dzazvino dzekuona dzekukuvadzwa kwepasi-pasi dzinoratidzwa mumufananidzo uri pazasi:

c

Classification uye pfupiso ye subsurface kukanganisa kukuvara nzira

Tsanangudzo pfupi yeidzi nzira dzekuyera dzinotevera:

A. Nzira dzinoparadza

a) Kupukuta nzira

Pamberi pekuonekwa kwemagnetorheological polishing, vashandi vemaziso vaiwanzoshandisa Taper polishing kuti vaongorore kukuvadzwa kwepasi-pasi kwezvikamu zvemaziso, kureva, kucheka nzvimbo yemaziso pamwe chete neAngle ye oblique kuti iite oblique yemukati, uye ipapo kupukuta nzvimbo ye oblique. Zvinowanzotendwa kuti kupukuta hakuzo wedzera kukuvara kwekutanga kwepasi-pasi. Kutsemuka kweiyo SSD layer ichave yakanyatso kuratidzwa kuburikidza nekunyudza corrosion nemakemikari reagents. Kudzika, kureba uye rumwe ruzivo rwe sub-surface kukuvara layer inogona kuyerwa nekutarisa kwekutarisa kwenzvimbo yakarerekera mushure mekunyudzwa. Gare gare, masayendisiti akagadzira nzira yeBall dimpling (Ball dimpling), iri kushandisa spherical polishing tool kupukuta pasi mushure mekukuya, kukanda gomba kunze, kudzika kwegomba kunofanira kunge kwakadzika sezvinobvira, kuitira kuti kuongorora. yerutivi rwegomba inogona kuwana iyo subsurface kukuvara ruzivo rweiyo yekutanga nzvimbo.

Nzira dzakajairika dzekuona kukuvadzwa kwepasi pevhu remaziso

Magnetorheological polishing (MRF) inyanzvi inoshandisa magineti yemvura tambo kukwenenzvera zvinhu zvinoonekwa, zvakasiyana kubva kune zvechinyakare asphalt/polyurethane polishing. Nenzira yechinyakare yekupukuta, chishandiso chekupukuta chinowanzo shandisa simba rakakura rakajairwa panzvimbo yemaziso, nepo Mr Polishing vachibvisa nzvimbo yemaziso munzira yetangential, saka Mr Polishing haachinje maitiro ekukuvadzwa kwepasi-pasi penzvimbo yemaziso. Naizvozvo, Mr Polishing inogona kushandiswa kupuruzira groove panzvimbo yemaziso. Ipapo nzvimbo yekupukuta inoongororwa kuti iongorore ukuru hwekukuvadzwa kwepasi peiyo yepakutanga optical surface.

d
a) Block gluing nzira

Iyi nzira yakashandiswa zvakare kuyedza sub-surface kukuvara. Muchokwadi, sarudza sikweya sampu ine chimiro chakafanana uye zvinhu, pukuta maviri epamusoro emuenzaniso, wobva washandisa chinonamira kunama nzvimbo mbiri dzakakwenenzverwa dzesampu pamwe chete, wobva wakuya mativi emasampuli maviri pamwechete panguva imwe chete. nguva. Mushure mekugaya, makemikari reagents anoshandiswa kupatsanura iwo maviri square samples. Saizi yekukuvadzwa kwepasi pevhu kunokonzerwa nedanho rekukuya inogona kuongororwa nekutarisa yakaparadzaniswa yakakwenenzverwa nzvimbo ine maikorosikopu. Iyo process schematic diagraph yeiyo nzira ndeiyi inotevera:

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Schematic dhayagiramu ye subsurface kukuvara kwekuonekwa ne block adhesive nzira

Iyi nzira ine zvimwe zvinogumira. Nekuti pane inonamira pamusoro, mamiriro enzvimbo inonamira anogona kusaratidza zvizere kukuvadzwa kwepasi pepasi mukati mechinhu mushure mekugaya, saka mhedzisiro yekuyera inogona kungoratidza mamiriro eSSD kusvika pamwero wakati.

a) Chemical etching

Iyo nzira inoshandisa yakakodzera makemikari ejenti kuti iparadze yakakanganisika layer ye optical surface. Mushure mekunge nzira yekukukurwa yapera, kukuvadzwa kwepasi kunoongororwa nechimiro chepamusoro uye kushata kwechikamu chepamusoro uye shanduko ye index yehuwandu hwekukukurwa. Anowanzo shandiswa kemikari reagents ihydrofluoric acid (HF), ammonium hydrogen fluoride (NH4HF) uye zvimwe zvinoparadza.

b) Nzira yemuchinjikwa chikamu

Sample inotsemurwa uye scanning electron microscope inoshandiswa kuona zvakananga saizi yekukuvadzwa kwepasi.

c) Dhayi impregnation nzira

Nemhaka yokuti nzvimbo yepamusoro yepasi optical element ine nhamba yakawanda ye microcracks, madhayi anogona kuumba ruvara rwakasiyana ne optical substrate kana kusiyana ne substrate inogona kudzvanywa muzvinyorwa. Kana iyo substrate iine chinhu chakasviba, madhayi efluorescent anogona kushandiswa. Kukuvadzwa kwepasi-pasi kunogona kutariswa zviri nyore optically kana nemagetsi. Nemhaka yokuti kuputika kunowanzova kwakanyatsonaka uye mukati mezvinyorwa, kana kudzika kwekupinda kwedhayi kupinza kusina kukwana, zvingasamiririra kudzika kwechokwadi kwe microcrack. Kuti tiwane kudzika kwekutsemuka nemazvo sezvinobvira, nzira dzakati wandei dzakarongwa dzekuisa dhayi: mechanical prepressing uye inotonhora isostatic pressing, uye kushandiswa kweelectron probe microanalysis (EPMA) kuona maronda edhayi pakadzika zvakanyanya.

B, nzira dzisiri dzekuparadza

a) Estimation nzira

Nzira yekufungidzira inonyanya kufungidzira hudzamu hwekukuvadzwa kwepasi-pasi zvichienderana nehukuru hwehukuru hwechinhu chinoputika uye ukuru hwekushata kwepamusoro kwechikamu. Vatsvagiri vanoshandisa huwandu hukuru hwebvunzo kuti vatarise hukama hunoenderana pakati pehukuru hwechikamu cheabrasive zvinhu uye kudzika kweiyo sub-pamusoro kukuvara, pamwe netafura inofananidzira pakati pehukuru hwekushata kwepamusoro kwechikamu uye sub- kukuvara kwepamusoro. Iyo subsurface kukuvara kweiyo ikozvino chikamu chepamusoro inogona kufungidzirwa nekushandisa tsamba yavo.

b) Optical Coherence Tomography (OCT)

Optical coherence tomography, musimboti waro Michelson interference, inoongorora ruzivo rwakayerwa kuburikidza nezviratidzo zvekuvhiringidza zvemarambu maviri echiedza. Iyi nzira inowanzoshandiswa kutarisa biological tissues uye kupa cross-sectional tomography ye subsurface chimiro chetishu. Kana tekinoroji yeOCT ichishandiswa kuona kukuvadzwa kwepasi pevhu remaziso, iyo refractive index parameter yemuenzaniso wakayerwa inofanirwa kutariswa kuti iwane kudzika chaiko. Iyo nzira inogona kunzi inoona hurema pakadzika 500μm ine vertical resolution yenani pane 20μm. Nekudaro, kana ichishandiswa pakuona kweSSD yezvigadzirwa zvemaziso, mwenje unoratidzwa kubva kuSSD layer hauna kusimba, saka zvinonetsa kuumba kupindira. Mukuwedzera, kupararira kwepamusoro kuchakanganisawo mibairo yekuyera, uye kuyerwa kwechiyero kunoda kuvandudzwa.

c) Laser kuparadzira nzira

Laser irradiation pane photometric pamusoro, kushandisa kuparadzira zvimiro zvelaser kuongorora saizi yekukuvadzwa kwepasi pevhu, yakadzidzwawo zvakanyanya. Zvakajairwa zvinosanganisira Total yemukati refection microscopy (TIRM), Confocal laser scanning microscopy (CLSM), uye intersecting polarization confocal microscopy (CPCM). cross-polarization confocal microscopy, nezvimwewo.

d) Kuongorora acoustic maikorosikopu

Scanning acoustic microscopy (SAM), senzira yekuongorora ye ultrasonic, inzira isingaparadze yekuyedza iyo inoshandiswa zvakanyanya kuona hurema hwemukati. Iyi nzira inowanzo shandiswa kuyera sampuli dzine nzvimbo dzakatsetseka. Kana iyo pamusoro peiyo sampuli yakaoma kwazvo, kuyerwa kwechiyero kuchaderedzwa nekuda kwesimba remafungu akapararira.

3 Subsurface kukuvara kudzora nzira

Icho chinangwa chedu chekupedzisira kunyatso kudzora kukuvadzwa kwepasi pezvinhu zvemaziso uye kuwana zvikamu zvinobvisa zvachose SSDS. Mumamiriro ezvinhu akajairwa, kudzika kwekukuvadzwa kwepasi-pasi kunoenderana nehukuru hweabrasive particle size, idiki saizi yeabrasive, iyo isina kudzika iyo sub-surface kukuvara, saka, nekudzikisa granularity yekukuya, uye zvizere. kugaya, unogona kunyatso kuvandudza dhigirii rekukuvadza kwepasi-pasi. Iyo yekugadzira dhizaini ye-sub-surface kukuvara kwekudzora mumatanho inoratidzwa mumufananidzo uri pazasi:

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Kukuvadzwa kwepasi pevhu kunodzorwa mumatanho
Nhanho yekutanga yekukuya ichabvisa zvizere kukuvadzwa kwepasi pevhu uye kuburitsa nyowani nyowani munhanho ino, uyezve muchikamu chechipiri chekukuya, zvinodikanwa kubvisa iyo SSD inogadzirwa muchikamu chekutanga uye kugadzira kutsva kwepasi pevhu kukuvadzwa. zvakare, kugadzirisa zvakare, uye kutonga saizi yechidimbu uye kuchena kweabrasive, uye pakupedzisira kuwana inotarisirwa nzvimbo yemaziso. Iri zvakare ndiro zano rekugadzirisa iro rakateverwa nekugadzirwa kwemaziso kwemazana emakore.

Uye zvakare, mushure mekuita kwekugaya, kunhonga pamusoro pechikamu kunogona kunyatso bvisa kukuvadzwa kwepasi-pasi, nekudaro kunatsiridza kunaka kwepamusoro uye nekuvandudza mashandiro ekugadzirisa.

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Email:jasmine@pliroptics.com ;
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Nguva yekutumira: Kubvumbi-18-2024