Iiparamitha ze-1 zokusebenza emva kokugquma
Kwinqaku elandulelayo, sazisa imisebenzi, imigaqo, isoftware yoyilo kunye nobuchule obuqhelekileyo bokugquma bamafilimu amancinci optical. Kule nqaku, sazisa ukuvavanywa kweeparamitha ze-post-coating. Iiparamitha zokusebenza kwendawo yecandelo emva kokugquma ziquka i-Transmittance (Transmittance), i-Reflectance (R), i-Absorptance (A), njl. Ukongeza, i-absorptance (Transmittance) njalo njalo. Uphawu lokusabalalisa i-S (I-Scatter) yendawo yefilimu nayo kufuneka ivavanywe kwaye ihlalutywe.
I-transmittance T ngumlinganiselo wamandla okukhanya okudlula kwifilimu ukuya kwisiganeko samandla okukhanya. Ukubonakaliswa kwe-R ngumlinganiselo wamandla obunzima obonakaliswe ngumphezulu we-coating kumandla esiganeko. I-Absorption A yireyishini yamandla okukhanya afunxwa ngumaleko wefilim ukuya kwisiganeko samandla okukhanya. Kwezi parameters zintathu, kukho ubudlelwane obulandelayo:
T + R + A = 1
Okokuthi, isixa sokuhanjiswa, ukubonakalisa kunye nokufunxa koluhlu lwefilimu luyi-1. Oku kuthetha ukuba emva kokuba i-beam yokukhanya idlule kwi-membrane, inxalenye yayo idluliselwe, inxalenye yayo ibonakaliswe kude, kwaye enye ininzi. ifunxwa yinwebu.
Kwiicandelo le-opticalimizobo, ukuhanjiswa okanye ukubonakaliswa komphezulu wefilimu ngokuqhelekileyo kuyadingeka, kwaye uluhlu lwe-spectral kunye ne-Angle yeziganeko phantsi kwemeko yesicelo kufuneka ichazwe ngokucacileyo. Ukuba i-polarization nayo iyafuneka, uluhlu lwamazwe e-polarization kufuneka luchazwe ngokucacileyo. Ngokomzekelo, iimfuno zokugquma kumfanekiso ongezantsi kukuba kwi-770nm, ukubonakaliswa kufuneka kungabi ngaphantsi kwe-88% kwi-45 degree degree, kunye ne-550nm, ukuhanjiswa kufuneka kungabi ngaphantsi kwe-70% kwi-45 degree degree.
Ukongeza kwiipropati ezingentla apha, iipropathi zomatshini kunye neekhemikhali zoluhlu lwefilimu ye-optical nazo kufuneka ziqwalaselwe, kubandakanywa nokuxhatshazwa kokugqoka, ukuqina, ukunyibilika kwefilimu. Ukongezelela, umgangatho we-optical surface emva kokugquma kwakhona kufuneka kuthathelwe ingqalelo, kubandakanywa neemfuno zokugoba, imikrwelo, ukungcola, amabala, njl.
2 Umgaqo-siseko we-spectrophotometer
Kweli phepha, sigxininise kwiimpawu ze-optical zeendlela zokuvavanya ifilimu ukwazisa, ekusebenzeni, i-Spectrophotometer ephambili (i-Spectrophotometer) kunye ne-Ellipsometer (i-Ellipsometer) ukuvavanya iiparameters zefilimu, i-spectrophotometer inokuvavanya ukuhanjiswa, ukubonakaliswa kunye neempawu zokufunxa ze-optical. iimveliso. I-ellipsometer inokulinganisa ubukhulu kunye neempawu ze-polarization zoluhlu lwefilimu, kwaye umgaqo wabo bobabini uyafana.
Isakhiwo sesixhobo esinjalo sinokwahlulwa sibe ngamacandelo amabini omzila wokuvelisa i-beam kunye ne-beam yokufumana ishaneli, xa ukuhanjiswa kwecandelo kufuneka kuhlolwe, icandelo libekwe phakathi kweendlela ezimbini, ukwenzela ukuba i-beam. idlula isampuli, xa i-reflectivity yecandelo idinga ukuvavanywa, icandelo libekwe kwicala elifanayo lemijelo emibini, ukwenzela ukuba i-beam ibonakaliswe yisampuli. Njengomzekelo, umgaqo we-spectrophotometer ukulinganisa ukuhanjiswa kwesampulu uboniswe kulo mzobo ulandelayo:
Kulo mfanekiso ungasentla, isiphelo sasekhohlo sisijelo sokuvelisa umqadi, kusetyenziswa umthombo wokukhanya obanzi wokukhanya ukuvelisa ukukhanya, kwaye emva koko ngokucandwa kwegrayiti kunye nokukhetha isisi, kuphume ubude obuthile bokukhanya, umqadi uyadlula. i-collimator 1, iba yintsimbi edibeneyo, kwaye emva koko idlula kwi-polarizer ekwazi ukujikeleza i-Angle, ibe kukukhanya kwe-polarized, kunye nokukhanya kwe-polarized kwahlulwe kwimiqadi emi-2 nge-spectroscope emva kokuba i-collimator 2 ihlanganiswe. I-beam yokukhanya ibonakaliswe kwi-detector yereferensi, apho i-beam yokukhanya eqokelelweyo isetyenziselwa ukulungisa i-drift yamandla ngenxa yokuguquguquka komthombo wokukhanya, kwaye enye i-beam yokukhanya idlula kwisampuli, yenziwe ngokutsha yi-collimator 3 kunye ne-collimator. 4, kwaye ingena kwi-detector ekupheleni ekunene kovavanyo. Kuvavanyo lwangempela, amaxabiso amabini amandla afunyanwa ngokufaka kunye nokuthatha isampuli evavanyiweyo, kwaye ukuhanjiswa kwesampuli kunokufumaneka ngokuthelekisa amandla.
Umgaqo we-ellipsometer ufana nomgaqo we-spectrophotometer engentla, ngaphandle kokuba i-1/4 i-wave plate ejikelezayo yongezwa njengento yembuyekezo kumbhobho wokuthumela umjelo kunye nomjelo wokufumana, kwaye i-polarizer nayo yongezwa kwijelo lokufumana. , ukwenzela ukuba iimpawu ze-polarization zesampulu zihlaziywe ngokuguquguqukayo. Kwezinye iimeko, i-ellipsometer iya kusebenzisa ngokuthe ngqo umthombo wokukhanya obanzi, kwaye yamkele i-slit kunye ne-splitter spectrometer ekupheleni kokufumana, idibaniswe ne-linear array detector, ukufezekisa uvavanyo lokusebenza lwecandelo.
3. Uvavanyo lokudlulisela
Kuvavanyo lwe-transmittance, ukwenzela ukuba ugweme ukubonakaliswa komtshini ofumana i-beam yokukhanya, i-sphere yokudibanisa idla ngokusetyenziswa njengommkeli, umgaqo uboniswa ngolu hlobo lulandelayo:
Njengoko kunokubonwa kulo mzobo ungasentla, i-sphere edibanisayo yingqukuva yomgxobhozo eqatywe ngezinto ezimhlophe zokwaleka ezibonisa ukwaleka kudonga lwangaphakathi, kwaye kukho umngxuma wefestile eludongeni lwebhola, esetyenziswa njengomngxuma wokukhanya wokukhanya kwesiganeko. kunye nomngxuma ofumanayo wesixhobo sokukhanya. Ngale ndlela, ukukhanya okungena kwi-sphere edibanisayo kubonakaliswa ngamaxesha amaninzi ngodonga lwangaphakathi, okwenza ukukhanya okufanayo kwindonga yangaphakathi, kwaye ifunyenwe ngumtshina.
Ngokomzekelo, ukwakheka kwesixhobo esisetyenziselwa ukuvavanya ukuhanjiswa kwepleyiti ye-optical kuboniswe ngezantsi
Kulo mzobo ungentla, isampuli evavanyiweyo ibekwe kwitafile yohlengahlengiso enokutshintshwa kwiindlela ze-x kunye ne-y. Ukuhanjiswa kwesampuli kunokuvavanywa nakweyiphi na indawo ngokulawulwa kwekhompyuter kwitafile yohlengahlengiso. Ukuhanjiswa kwe-transmittance yeglasi yonke ethe tyaba nako kunokufumaneka ngovavanyo lokuskena, kwaye isisombululo sovavanyo sixhomekeke kubungakanani bebala lomqadi.
4. Uvavanyo lokuzibonakalisa
Ukulinganisa ifilimu ye-optical reflectivity, ngokuqhelekileyo kukho iindlela ezimbini, enye imilinganiselo ehambelanayo kwaye enye ingumlinganiselo opheleleyo. Indlela yokulinganisa enxulumeneyo ifuna isibonisi esibonakalisayo esaziwayo ukuba sisetyenziswe njengesalathiso sovavanyo lokuthelekisa. Ngokwenza umsebenzi, ukubonakaliswa kwesibuko sesithenjwa kufuneka kulinganiswe rhoqo kunye nokuguga okanye ukungcoliswa kwefilimu. Ngoko ke, le ndlela ineempazamo zokulinganisa ezinokubakho. Indlela yokulinganisa imbonakalo epheleleyo ifuna ulungelelwaniso lokubonakaliswa kwesixhobo sovavanyo ngaphandle kokubeka isampuli. Kulo mfanekiso ungezantsi, ulwakhiwo lwesixhobo seVW sakudala sinikwe ukuphumeza umlinganiselo opheleleyo wokubonakaliswa kwesampulu:
Umfanekiso osekhohlo kulo mfanekiso ungasentla ubonisa isakhiwo esine-V esinezibuko ezintathu, i-M1, i-M2 kunye ne-M3. Okokuqala, ixabiso lokukhanya kokukhanya kule modi livavanywa kwaye lirekhodwa njenge-P1. Emva koko, kumfanekiso ochanekileyo, isampuli phantsi kovavanyo ifakwe, kwaye isibuko se-M2 sijikelezwe kwindawo ephezulu ukuze senze isakhiwo esinobumba obungu-W. Ukubonakaliswa ngokupheleleyo kwesampulu elinganisiweyo kunokufumaneka. Esi sixhobo sinokuphuculwa kwakhona, umzekelo, isampuli phantsi kovavanyo kwakhona ixhotyiswe ngetafile ejikelezayo ezimeleyo, ukuze isampuli phantsi kovavanyo ijikelezwe kuyo nayiphi na i-Angle, ngokujikeleza isibuko se-M2 kwindawo yokubonisa ehambelanayo, ukuphumeza i-beam output, ukwenzela ukuba i-reflection yesampuli inokuvavanywa kwii-engile ezininzi.
Njengomzekelo, ubume besixhobo esisetyenziselwa ukuvavanya ukubonakaliswa kwepleyiti ye-optical kuboniswe ngezantsi:
Kulo mfanekiso ungentla, isampuli evavanyiweyo ifakwe kwi-x / y itafile yokulungelelanisa, kwaye i-reflectivity yesampuli inokuvavanywa nakweyiphi na indawo ngokusebenzisa ulawulo lwekhompyutheni yetafile yokulungelelanisa. Ngovavanyo lokuskena, imephu yokuhanjiswa kwembonakalo yeglasi yonke ecaba nayo inokufumaneka.
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Yongeza:Isakhiwo 1, No.1558, indlela yobuntlola, qingbaijiang, chengdu, sichuan, china
Ixesha lokuposa: Apr-23-2024