1 Inkcazo kunye nezizathu zomonakalo ongaphantsi komhlaba
Umonakalo we-Sub-surface wamacandelo optical (i-SSD, umonakalo ongaphantsi komhlaba) udla ngokukhankanywa kwizicelo ezichanekileyo eziphezulu ezifana ne-laser eqinile kunye noomatshini be-lithography, kwaye ubukho bayo bunqanda ukuchaneka kokugqibela kwamacandelo optical kwaye kuchaphazela ngakumbi umfanekiso. ukusebenza kweenkqubo ze-optical, ngoko ke kufuneka kuhlawulwe ingqwalasela eyaneleyo. Umonakalo ongaphantsi komhlaba udla ngokubonakaliswa ngokuqhekeka ngaphakathi kwendawo kunye neengqimba zoxinzelelo lwangaphakathi, ezibangelwa kukuqhekeka okuthile okushiyekileyo kunye nokuguqulwa kokwakheka kwezinto kwindawo ekufutshane. Imodeli yomonakalo ongaphantsi komhlaba iboniswa ngolu hlobo lulandelayo: umaleko ongaphezulu ngumaleko wentlenga okhazimlisiweyo, kwaye ke umaleko wesiphene sokuqhekeka kunye nomgangatho woxinzelelo lomgangatho ngumaleko ongezantsi, kwaye umaleko wempahla ngaphandle komonakalo ngumaleko ongaphakathi. Phakathi kwazo, umaleko wesiphene sokuqhekeka kunye nomgangatho woxinzelelo loxinzelelo ngumonakalo ongaphantsi komhlaba.
Imodeli yomonakalo ongaphantsi komhlaba wezinto ezibonakalayo
Izinto ezibonakalayo ezibonakalayo ziyiglasi, iiseramikhi kunye nezinye izinto ezinzima kunye nezinqabileyo, kwinqanaba lokuqala lokucubungula lamacandelo, kufuneka lihambe ngokubumba, ukucola okucokisekileyo kunye neenkqubo zokupolisha ezirhabaxa, kwezi nkqubo, ukucola koomatshini kunye neekhemikhali zokuphendula zikhona. kwaye udlale indima. Isixhobo esine-abrasive okanye i-abrasive xa sidibana nomphezulu we-element sineempawu zobungakanani besuntswana elingalinganiyo, kwaye amandla kwindawo nganye yoqhagamshelwano kumphezulu we-element ayifani, ngoko ke i-convex kunye ne-concave layer kunye ne-crack layer iya kuthi. iveliswe kumphezulu weglasi. Izinto ezikhoyo kwinqanaba eliqhekekileyo licandelo eliye laphuka ngexesha lokugaya, kodwa alizange liwele phezulu, ngoko ke umonakalo ongaphantsi komhlaba uya kwenziwa. Ingaba i-abrasive grinding of particles loose okanye i-CNC yokugaya, le nto iya kwenziwa phezu kwezinto eziphathekayo. Esona siphumo somonakalo ongaphantsi komphezulu siboniswe kulo mfanekiso ulandelayo:
Unikezelo lomonakalo ongaphantsi komhlaba
2 Iindlela zokulinganisa umonakalo ongaphantsi komhlaba
Ekubeni umonakalo ongaphantsi komhlaba awukwazi ukuhoywa, kufuneka ulawulwe ngokufanelekileyo ngabavelisi becandelo le-optical. Ukuze ulawule ngokufanelekileyo, kuyimfuneko ukuchonga ngokuchanekileyo kunye nokubona ubungakanani bomonakalo ongaphantsi komhlaba kwindawo yecandelo, ukususela ekuqaleni kwenkulungwane yokugqibela, abantu baye baqulunqa iindlela ezahlukeneyo zokulinganisa nokuvavanya ubukhulu. yomonakalo ongaphantsi komhlaba wecandelo, ngokwendlela yenqanaba lempembelelo kwi-optical component, inokwahlulwa ibe ngamacandelo amabini: umlinganiselo owonakalisayo kunye nomlinganiselo ongonakalisi (uvavanyo olungonakalisi).
Indlela yokulinganisa eyonakalisayo, njengoko igama libonisa, yimfuneko yokutshintsha ubume bomphezulu bento ebonakalayo, ukuze kubonakaliswe umonakalo ongaphantsi komhlaba ongelula ukuwujonga, kwaye emva koko usebenzise i-microscope kunye nezinye izixhobo zokujonga. indlela yokulinganisa, le ndlela idla ngokutya ixesha, kodwa iziphumo zayo zokulinganisa zithembekile kwaye zichanekile. Iindlela zokulinganisa ezingonakalisiyo, ezingabangeli monakalo owongezelelweyo kumphezulu wecandelo, sebenzisa ukukhanya, isandi, okanye amanye amaza ombane ukukhangela umaleko womonakalo ongaphantsi komhlaba, kwaye usebenzise isixa sotshintsho lwepropathi olwenzeka kumaleko ukuvavanya ubungakanani i-SSD, iindlela ezinjalo zilula kwaye zikhawuleza, kodwa ngokuqhelekileyo kuqwalaselwa umgangatho. Ngokwalolu lwahlulo, iindlela zangoku zokufumanisa umonakalo ongaphantsi komhlaba ziboniswe kumzobo ongezantsi:
Ukuhlelwa kunye nesishwankathelo seendlela zokubona umonakalo ongaphantsi komhlaba
Inkcazo emfutshane yezi ndlela zokulinganisa ilandelayo:
A. Iindlela ezitshabalalisayo
a) Indlela yokuhombisa
Ngaphambi kokubonakala kokupholiswa kwe-magnetorheological, abasebenzi be-optical bavame ukusebenzisa i-Taper polishing ukuhlalutya umonakalo ongaphantsi komhlaba wamacandelo optical, oko kukuthi, ukusika umphezulu optical kunye ne-Angle e-oblique ukwenza umphezulu oblique wangaphakathi, kwaye emva koko ukugulisa umphezulu oblique. Ngokuqhelekileyo kukholelwa ukuba ukupolishwa akusayi kuwenza mandundu umonakalo ongaphantsi komhlaba. Ukuqhekeka komgangatho we-SSD kuya kutyhilwa ngokucacileyo ngokuntywiliselwa ukubola kunye ne-reagents yeekhemikhali. Ubunzulu, ubude kunye nolunye ulwazi lwe-sub-surface umonakalo umaleko unokulinganiswa ngokujongwa kwe-optical surface ethambekele emva kokuntywiliselwa. Kamva, izazinzulu zaqulunqa indlela Ball dimpling (Ball dimpling), nto leyo ukusebenzisa isixhobo yokugudisa olungqukuva ukugudisa umphezulu emva kokusila, ukuphosa umngxuma ngaphandle, ubunzulu emhadini kufuneka ibe nzulu kangangoko kunokwenzeka, ukuze uhlalutyo. kwicala lomngxuma linokufumana ulwazi lomonakalo ongaphantsi komhlaba womgangatho wokuqala.
Iindlela eziqhelekileyo zokubona umonakalo ongaphantsi komhlaba wezinto ezibonakalayo
Ukupholisha kweMagnetorheological (MRF) bubuchule obusebenzisa umcu wemagnethi ukupolisha amalungu abonayo, okwahlukileyo kwiasphalt yemveli/ipolyurethane yokupholisha. Kwindlela yendabuko yokupholisa, isixhobo sokupholisha ngokuqhelekileyo sisebenzisa amandla amakhulu aqhelekileyo kwindawo ye-optical surface, ngelixa uMnumzana Polishing esusa ubuso be-optical kwi-tangential direction, ngoko ke uMnumzana we-Polishing akatshintshi iimpawu zokuqala zomonakalo we-sub-surface optical surface. Ke ngoko, uMnu Polishing unokusetyenziselwa ukupolisha igroove kumphezulu obonakalayo. Emva koko indawo yokupholisa ihlalutye ukuvavanya ubungakanani bomonakalo ongaphantsi komhlaba we-original optical surface.
a) Indlela yokuncamathelisa ibhloko
Le ndlela isetyenziselwe ukuvavanya umonakalo ongaphantsi komphezulu. Ngapha koko, khetha isampula yesikweri esinemilo efanayo kunye nezinto eziphathekayo, upholise imiphezulu emibini yesampulu, kwaye emva koko usebenzise i-adhesive ukuncamathelisa iindawo ezimbini ezikhazimlisiweyo zesampulu kunye, kwaye usile amacala eisampulu zombini kunye ngexesha elinye. ixesha. Emva kokugaya, ii-reagents zeekhemikhali zisetyenziselwa ukwahlula iisampuli ezimbini zesikwere. Ubungakanani bomonakalo ongaphantsi komhlaba obangelwa yinqanaba lokusila linokuvavanywa ngokuqwalasela indawo edibeneyo epholisiweyo nge-microscope. Umzobo wenkqubo yenkqubo yendlela yile ilandelayo:
Umzobo weSchematic of the subsurface umonakalo ofunyenwe ngendlela yokubambelela kwibhloko
Le ndlela inemida ethile. Ngenxa yokuba kukho indawo encangathi, imeko yendawo encangathi ayinakubonakalisa ngokupheleleyo umonakalo ongaphantsi komhlaba ngaphakathi kwezinto emva kokusila, ngoko ke iziphumo zokulinganisa zinokubonisa kuphela imeko ye-SSD ukuya kwinqanaba elithile.
a) Ukufakwa kweekhemikhali
Indlela isebenzisa ii-agent zeekhemikhali ezifanelekileyo ukutshabalalisa umaleko owonakalisiweyo we-optical surface. Emva kokuba inkqubo yokhukuliseko igqityiwe, umonakalo ongaphantsi komhlaba uvandlakanywa ngokubunjwa komphezulu kunye noburhabaxa becandelo lecandelo kunye notshintsho lwesalathiso somlinganiselo wokukhukuliseka. Iikhemikhali ezisetyenziswa ngokuqhelekileyo ziyi-hydrofluoric acid (HF), i-ammonium hydrogen fluoride (NH4HF) kunye nezinye ii-agent ezidliwayo.
b) Indlela yecandelo elinqamlezayo
Isampuli iyachithwa kwaye i-electron microscope yokuskena isetyenziselwa ukujonga ngokuthe ngqo ubungakanani bomonakalo ongaphantsi komhlaba.
c) Indlela yokumilisela idayi
Ngenxa yokuba umgangatho ongaphezulu we-optical element yomhlaba uqulethe inani elikhulu le-microcracks, iidayi ezinokuthi zenze ukungafani kombala kunye ne-substrate ye-optical okanye i-substrate kunye ne-substrate inokucinezelwa kwizinto eziphathekayo. Ukuba i-substrate iqukethe izinto ezimnyama, iidayi ze-fluorescent zingasetyenziswa. Umonakalo ongaphantsi komphezulu unokujongwa ngokulula nge-optically okanye nge-elektroniki. Ngenxa yokuba iintanda zihlala zihle kakhulu kwaye zingaphakathi kwizinto eziphathekayo, xa ubunzulu bokungena kwedayi yokungena akwanelanga, akunakumela ubunzulu bokwenene be-microcrack. Ukuze kufunyanwe ubunzulu bokuqhekeka ngokuchanekileyo kangangoko kunokwenzeka, kuye kwacetywa inani leendlela zokumitha idayi: ukucinezela ngoomatshini kunye nocinezelo olubandayo lwe-isostatic, kunye nokusetyenziswa kwe-electron probe microanalysis (EPMA) ukukhangela imikhondo yedayi kwindawo ephantsi kakhulu.
B, iindlela ezingonakalisi
a) Indlela yoqikelelo
Indlela yoqikelelo ikakhulu iqikelela ubunzulu bomonakalo ongaphantsi komhlaba ngokobungakanani besuntswana lezinto ezirhabaxa kunye nobukhulu boburhabaxa bomphezulu becandelo. Abaphandi basebenzisa inani elikhulu lovavanyo ukuseka ubudlelwane obuhambelanayo phakathi kobungakanani besuntswana lezinto ezirhabaxa kunye nobunzulu bomonakalo ongaphantsi komhlaba, kunye netafile ehambelanayo phakathi kobukhulu boburhabaxa bomphezulu becandelo kunye ne-sub- umonakalo womphezulu. Umonakalo ongaphantsi komhlaba wecandelo langoku unokuqikelelwa ngokusebenzisa imbalelwano yabo.
b) iTomography yokuNxibelelana ngamehlo (OCT)
I-Optical coherence tomography, umgaqo osisiseko we-Michelson interference, uvavanya ulwazi olulinganisiweyo ngokusebenzisa izibonakaliso zokuphazamiseka kwemisebe emibini yokukhanya. Ubuchwephesha busetyenziswa ngokuqhelekileyo ukujonga izicubu zebhayoloji kwaye zinike i-tomography enqamlezayo yesakhiwo esingaphantsi komhlaba. Xa ubuchule be-OCT busetyenziselwa ukujonga umonakalo ongaphantsi komhlaba womphezulu obonakalayo, iparamitha yesalathiso serefractive yesampulu elinganisiweyo kufuneka ithathelwe ingqalelo ukufumana ubunzulu bokwenyani bokuqhekeka. Indlela enokuthi ibone iziphene kubunzulu be-500μm kunye nesisombululo esithe nkqo esingcono kune-20μm. Nangona kunjalo, xa isetyenziselwa ukufunyanwa kwe-SSD yezinto ezibonakalayo, ukukhanya okubonakaliswe kwi-SSD umaleko kubuthathaka, ngoko kunzima ukwenza ukuphazamiseka. Ukongezelela, ukuchithwa komhlaba kuya kuchaphazela iziphumo zokulinganisa, kwaye ukuchaneka kokulinganisa kufuneka kuphuculwe.
c) Indlela yokusasazwa kweLaser
I-Laser irradiation kwi-photometric surface, usebenzisa iipropati zokusabalalisa i-laser ukuvavanya ubungakanani bomonakalo ongaphantsi komhlaba, nayo ifundwe ngokubanzi. Ezona ziqhelekileyo ziquka iTotali ye-microscopy ye-refection yangaphakathi (TIRM), i-Confocal laser scanning microscopy (CLSM), kunye ne-intersecting polarization confocal microscopy (CPCM). cross-polarization confocal microscopy, njl.
d) Ukuskena imakroskopu yeacoustic
Ukuskena i-acoustic microscopy (SAM), njengendlela yokufumanisa i-ultrasonic, yindlela yokuvavanya engonakalisi esetyenziswa ngokubanzi ukufumanisa iziphene zangaphakathi. Le ndlela idla ngokusetyenziselwa ukulinganisa iisampulu ezinemigangatho egudileyo. Xa umphezulu wesampuli unzima kakhulu, ukuchaneka kokulinganisa kuya kuncitshiswa ngenxa yempembelelo yamaza ahlakazekileyo.
3 Iindlela zokulawula umonakalo ongaphantsi komhlaba
Yeyona njongo yethu iphambili ukulawula ngokufanelekileyo umonakalo ongaphantsi komhlaba wamacandelo okukhanya kunye nokufumana amacandelo asusa ngokupheleleyo i-SSDS. Ngaphantsi kweemeko eziqhelekileyo, ubunzulu bomonakalo ongaphantsi komhlaba bulingana nobukhulu be-particle ye-abrasive, encinci i-particle size ye-abrasive, i-shantier ye-sub-surface umonakalo, ngoko ke, ngokunciphisa i-granularity yokusila, kwaye ngokupheleleyo. ukugaya, unokuphucula ngokufanelekileyo iqondo lomonakalo ongaphantsi komhlaba. Umzobo wokusetyenzwa wolawulo lomonakalo ongaphantsi komhlaba ngokwezigaba ubonisiwe kumzobo ongezantsi:
Umonakalo ongaphantsi komhlaba ulawulwa ngezigaba
Inqanaba lokuqala lokugaya liya kususa ngokupheleleyo umonakalo ongaphantsi komhlaba kwindawo engenanto kwaye ivelise i-subsurface entsha kweli nqanaba, kwaye ke kwinqanaba lesibini lokugaya, kuyimfuneko ukususa i-SSD eyenziwe kwinqanaba lokuqala kwaye ivelise umonakalo omtsha ongaphantsi komhlaba. kwakhona, ukucutshungulwa ngokulandelelana, kunye nokulawula ubungakanani besuntswana kunye nokucoceka kwe-abrasive, kwaye ekugqibeleni ufumane indawo elindelekileyo ye-optical. Esi sisicwangciso sokusebenza esilandelwe yimveliso yamehlo amakhulu eminyaka.
Ukongezelela, emva kwenkqubo yokugaya, ukuthabatha indawo yecandelo kunokususa ngokufanelekileyo umonakalo ongaphantsi komhlaba, ngaloo ndlela kuphuculwe umgangatho ophezulu kunye nokuphucula ukusebenza kakuhle.
Qhagamshelana:
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Yongeza:Isakhiwo 1, No.1558, indlela yobuntlola, qingbaijiang, chengdu, sichuan, china
Ixesha lokuposa: Apr-18-2024