Izimiso zefilimu emincane ye-Optical, isofthiwe yokuklama kanye nobuchwepheshe bokuhlanganisa

1 Izimiso zamafilimu optical

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Kulesi sihloko, sizokwethula izimiso zamafilimu amancane optical, isofthiwe yokuklama evame ukusetshenziswa kanye nobuchwepheshe bokugqoka.

Isimiso esiyisisekelo sokuthi kungani amafilimu e-optical angafinyelela imisebenzi eyingqayizivele efana ne-anti-reflection, ukukhanya okuphezulu noma ukuhlukaniswa kokukhanya ukuphazanyiswa kokukhanya kwefilimu encane. Amafilimu azacile ngokuvamile akhiwa iqembu elilodwa noma ngaphezulu lezingqimba zenkomba yenkomba ecwebezelayo kanye nezendlalelo zenkomba ephansi ye-refractive ezibekwe phezulu ngokushintshana. Lezi zinto zongqimba lwefilimu ngokuvamile ziyi-oxides, izinsimbi noma ama-fluoride. Ngokusetha inombolo, ukujiya kanye nezendlalelo zefilimu ezihlukene zefilimu, Umehluko kunkomba ye-refractive phakathi kwezendlalelo ungalawula ukuphazamiseka kwemishayo yokukhanya phakathi kwezendlalelo zefilimu ukuze kutholwe imisebenzi edingekayo.

Ake sithathe i-anti-reflection coating njengesibonelo ukuze sibonise lesi simo. Ukuze kwandiswe noma kuncishiswe ukuphazamiseka, ukujiya kwe-optical kwesendlalelo sokumboza kuvame ukuba yi-1/4 (QWOT) noma i-1/2 (HWOT). Emfanekisweni ongezansi, inkomba ye-refractive ye-medium yesigameko ingu-n0, futhi inkomba ye-refractive ye-substrate i-ns. Ngakho-ke, isithombe senkomba ye-refractive yento yefilimu engaveza izimo zokukhansela ukuphazamiseka singabalwa. I-beam yokukhanya eboniswa indawo engaphezulu yongqimba lwefilimu ingu-R1, I-beam yokukhanya eboniswa indawo engezansi yefilimu ingu-R2. Uma ukujiya kwefilimu kuyi-1/4 wavelength, umehluko wendlela yokubona phakathi kuka-R1 no-R2 ungu-1/2 we-wavelength, futhi izimo zokuphazanyiswa ziyahlangatshezwa, ngaleyo ndlela kukhiqizwe ukuphazamiseka okulimazayo. Isimanga.

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Ngale ndlela, ukuqina kwe-beam ebonisiwe kuba kuncane kakhulu, ngaleyo ndlela kufezeke inhloso yokuphikisa.

2 Isoftware yokuklama ifilimu elincanyana elibonakalayo

Ukuze kube lula ochwepheshe ukuthi baklame izinhlelo zefilimu ezihlangabezana nemisebenzi ethile ehlukahlukene, kuye kwasungulwa isofthiwe yokuklama ifilimu emincane. Isofthiwe yokuklama ihlanganisa izinto zokumboza ezivame ukusetshenziswa kanye nemingcele yazo, ukulingisa ungqimba lwefilimu kanye nama-algorithms okuthuthukisa kanye nemisebenzi yokuhlaziya, okwenza kube lula kochwepheshe ukuthi bathuthukise futhi bahlaziye. Amasistimu ahlukahlukene amafilimu. Isoftware esetshenziswa kakhulu yokuklama ifilimu imi kanje:

A.TFCalc

I-TFCalc iyithuluzi lomhlaba wonke lokuklama nokuhlaziya ifilimu elincanyana. Ingasetshenziselwa ukuklama izinhlobo ezahlukene zokulwa ne-reflection, i-high-reflection, i-bandpass, i-spectroscopic, isigaba nezinye izinhlelo zefilimu. I-TFCalc ingaklama isistimu yefilimu enezinhlangothi ezimbili endaweni engaphansi, enezendlalelo zefilimu ezifika ku-5,000 endaweni eyodwa. Isekela okokufaka kwamafomula esitaki sefilimu futhi ingalingisa izinhlobo ezihlukahlukene zokukhanyisa: njengemigqa yekhoni, imishayo yemisebe engahleliwe, njll. Okwesibili, isofthiwe inemisebenzi ethile yokuthuthukisa, futhi ingasebenzisa izindlela ezifana nenani elidlulele nezindlela ezihlukile ukuze ithuthukise ukukhanya. reflectivity, transmittance, absorbance, phase, ellipsometry parameters kanye nezinye izinhloso zesistimu yefilimu. Isofthiwe ihlanganisa imisebenzi ehlukahlukene yokuhlaziya, efana ne-reflection, transmittance, absorbance, ellipsometry parameter analysis, electric field intensity distribution curve, reflection of film system and transmission color analysis, crystal control curve calculation, film layer tolerance and sensitivity analysis , Ukuhlaziywa Kwesivuno, njll. I-interface yokusebenza ye-TFCalc imi kanje:

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Kusixhumi esibonakalayo sokusebenza esiboniswe ngenhla, ngokufaka amapharamitha nezimo zemingcele nokwandisa, ungathola isistimu yefilimu ehlangabezana nezidingo zakho. Ukusebenza kulula futhi kulula ukuyisebenzisa.

B. Essential Macleod

I-Essential Macleod iwukuhlaziya okuphelele kwefilimu kanye nephakheji yesofthiwe yokuklama enokusebenzelana kwangempela kwemibhalo eminingi. Ingakwazi ukuhlangabezana nezidingo ezihlukahlukene ekwakhiweni kokumboza ukukhanya, kusukela kumafilimu alula ongqimba olulodwa kuya kumafilimu aqinile e-spectroscopic. , ingaphinda ihlole izihlungi ze-wavelength division multiplexing (WDM) kanye nezihlungi eziminyene ze-wavelength division multiplexing (DWDM). Ingakwazi ukuklama kusukela ekuqaleni noma ithuthukise imiklamo ekhona, futhi ingahlola amaphutha ekwakhiweni. Inothile ngemisebenzi futhi inamandla.

I-interface yokuklama yesofthiwe iboniswa esithombeni esingezansi:

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C. OptiLayer

Isoftware ye-OptiLayer isekela yonke inqubo yamafilimu amancane abonakalayo: amapharamitha - ukuklama - ukukhiqizwa - ukuhlaziywa kokuguqulwa. Ihlanganisa izingxenye ezintathu: i-OptiLayer, i-OptiChar, ne-OptiRE. Kukhona nelabhulali ye-OptiReOpt dynamic link (DLL) engathuthukisa imisebenzi yesofthiwe.

I-OptiLayer ihlola umsebenzi wokuhlola kusukela ekwakhiweni kuya kokuphokophelwe, ifinyelela umgomo wokuklama ngokulungiselela, futhi yenza ukuhlaziya iphutha lokukhiqiza ngaphambilini. I-OptiChar ihlola umsebenzi womehluko phakathi kwezici ze-spectral yezinto eziwungqimba kanye nezici zayo ezilinganiselwe ze-spectral ngaphansi kwezici ezihlukahlukene ezibalulekile zethiyori yefilimu encane, futhi ithola imodeli yempahla yongqimba engcono nengokoqobo kanye nomthelela wesici ngasinye ekwakhiweni kwamanje, ekhomba ukusetshenziswa izici ezidinga ukucatshangelwa lapho uklama lolu ungqimba lwezinto zokwakha? I-OptiRE ihlola izici ze-spectral zemodeli yokuklama kanye nezici ze-spectral zemodeli elinganiswa ngokuhlolwa ngemva kokukhiqiza. Ngokuguqulwa kobunjiniyela, sithola amaphutha athile akhiqizwa ngesikhathi sokukhiqiza futhi siwabuyisele kunqubo yokukhiqiza ukuze siqondise ukukhiqizwa. Amamojula angenhla angaxhunyaniswa ngomsebenzi womtapo wolwazi oguquguqukayo, ngaleyo ndlela ebona imisebenzi efana nokuklama, ukuguqulwa kanye nokuqapha kwesikhathi sangempela ochungechungeni lwezinqubo kusukela ekwakhiweni kwefilimu kuya ekukhiqizweni.

3 Ubuchwepheshe bokugqoka

Ngokusho kwezindlela ezihlukene zokucwenga, zingahlukaniswa zibe izigaba ezimbili: ubuchwepheshe bokuhlanganisa amakhemikhali kanye nobuchwepheshe bokugqoka ngokomzimba. Ubuchwepheshe be-Chemical enamathela ngokuyinhloko ihlukaniswe ngokucwiliswa kwe-plating kanye ne-spray plating. Lobu buchwepheshe bungcolisa kakhulu futhi bungasebenzi kahle kwefilimu. Kancane kancane ithathelwa indawo isizukulwane esisha sobuchwepheshe bokuhlanganisa umzimba. Ukugcoba umzimba kwenziwa ngokuhwamuka kwe-vacuum, i-ion plating, njll. I-vacuum coating iyindlela yokuhwamuka (noma yokufafaza) izinsimbi, izinhlanganisela nezinye izinto zefilimu ku-vacuum ukuze zifakwe ku-substrate ezogcotshwa. Endaweni ye-vacuum, imishini yokumboza inokungcola okumbalwa, okungavimbela i-oxidation yendawo ebonakalayo futhi isize ukuqinisekisa ukufana kwe-spectral nokuvumelana kokuqina kwefilimu, ngakho-ke isetshenziswa kabanzi.

Ngaphansi kwezimo ezijwayelekile, ukucindezela komkhathi okungu-1 kucishe kube ngu-10 kumandla we-5 Pa, futhi umfutho womoya odingekayo ukuze kufakwe i-vacuum kuvame ukuba ngu-10 emandleni we-3 Pa nangaphezulu, okungeye-vacuum coating ephezulu. Ekufakweni kwe-vacuum, ingaphezulu lezingxenye ze-optical lidinga ukuhlanzeka kakhulu, ngakho-ke igumbi le-vacuum ngesikhathi sokucubungula nalo lidinga ukuhlanzeka kakhulu. Njengamanje, indlela yokuthola indawo ehlanzekile yevacuum ngokuvamile ukusebenzisa i-vacuum. Amaphampu okusabalalisa uwoyela, Iphampu yamangqamuzana noma iphampu yokujiya isetshenziselwa ukukhipha i-vacuum futhi kutholwe indawo yokuhlanza ephezulu. Amaphampu okusabalalisa uwoyela adinga amanzi okupholisa kanye nephampu esekelayo. Zinkulu ngosayizi futhi zisebenzisa amandla aphezulu, okuzodala ukungcola enqubweni yokumboza. Amaphampu amangqamuzana ngokuvamile adinga iphampu esekelayo ukuze asize emsebenzini wawo futhi ayabiza. Ngokuphambene, amaphampu e-condensation awabangeli ukungcola. , ayidingi iphampu esekelayo, inokusebenza okuphezulu nokuthembeka okuhle, ngakho-ke ifaneleka kakhulu ekufakweni kwe-optical vacuum. Igumbi langaphakathi lomshini ojwayelekile wokuvala i-vacuum liboniswa esithombeni esingezansi:

Ekufakweni kwe-vacuum, ifilimu idinga ukushiswa ibe yigesi bese ifakwa phezu kwe-substrate ukuze kwakhe ungqimba lwefilimu. Ngokwezindlela ezihlukene zokucwenga, ingahlukaniswa ngezinhlobo ezintathu: ukushisa okuhwamuka okushisayo, ukushisa okufafazayo kanye ne-ion plating.

Ukushisisa okuhwamuka okushisayo kuvame ukusebenzisa intambo yokumelana noma ukungeniswa kwefrikhwensi ephezulu ukuze kushise i-crucible, ukuze into yefilimu ku-crucible ifudumale futhi ihwamuke ukuze kwakhe ukunamathela.

Ukushisa kwe-sputtering kuhlukaniswe ngezinhlobo ezimbili: ukushisa kwe-ion beam sputtering kanye nokushisa kwe-magnetron sputtering. Ukushisa kwe-ion beam sputtering kusebenzisa isibhamu se-ion ukukhipha i-ion beam. I-ion beam iqhumisa ithagethi nge-engeli ethile yesigameko futhi ikhiphe ungqimba lwalo olungaphezulu. ama-athomu, afaka phezu kwe-substrate ukuze enze ifilimu elincanyana. Okubi okuyinhloko kokufafaza kwe-ion beam ukuthi indawo ebhomuwe endaweni okuqondiwe kuyo incane kakhulu futhi izinga lokubeka liphansi ngokuvamile. Ukushisisa kwe-Magnetron sputtering kusho ukuthi ama-electron asheshisa abheke ku-substrate ngaphansi kwesenzo senkambu kagesi. Phakathi nale nqubo, ama-electron ashayisana nama-athomu egesi e-argon, enza i-ionizing inombolo enkulu yama-argon ion nama-electron. Ama-electron andizela ku-substrate, futhi ama-argon ion ashiswa insimu kagesi. Okuhlosiwe kuyasheshiswa futhi kuqhunyiswe ngebhomu ngaphansi kwesenzo salokho okuqondiwe, futhi ama-athomu athagethi amaphakathi kokuhlosiwe afakwa ku-substrate ukuze enze ifilimu. I-Magnetron sputtering ibonakala ngezinga eliphezulu lokubunjwa kwefilimu, izinga lokushisa eliphansi le-substrate, ukunamathela okuhle kwefilimu, futhi ingafinyelela ukumbozwa kwendawo enkulu.

I-ion plating ibhekisela endleleni esebenzisa ukuchithwa kwegesi ukwenza igesi ionini kancane noma izinto ezihwamukayo, futhi ifake izinto ezihwamukayo endaweni engaphansi ngaphansi kokuqhuma kwama-ion egesi noma ama-ion ezinto ezihwamukile. Ion plating iyinhlanganisela yokuhwamuka kwevacuum kanye nobuchwepheshe be-sputtering. Ihlanganisa izinzuzo zokuhwamuka kanye nezinqubo ze-sputtering futhi ingamboza ama-workpieces ngezinhlelo zefilimu eziyinkimbinkimbi.

4 Isiphetho

Kulesi sihloko, siqala ukwethula izimiso eziyisisekelo zamafilimu optical. Ngokusetha inombolo nokuqina kwefilimu kanye nomehluko kunkomba ye-refractive phakathi kwezingqimba zefilimu ezihlukene, singakwazi ukufeza ukuphazamiseka kwemishayo yokukhanya phakathi kwezendlalelo zefilimu, ngaleyo ndlela sithole umsebenzi odingekayo wesendlalelo sefilimu. Lesi sihloko sibe sethula isofthiwe yokuklama ifilimu evame ukusetshenziswa ukunikeza wonke umuntu ukuqonda kokuqala komklamo wefilimu. Engxenyeni yesithathu ye-athikili, sinikeza isingeniso esiningiliziwe sobuchwepheshe bokugqoka, sigxile kubuchwepheshe be-vacuum coating obusetshenziswa kabanzi ekusebenzeni. Ngikholelwa ukuthi ngokufunda lesi sihloko, wonke umuntu uzoba nokuqonda okungcono kwe-optical coating. Esihlokweni esilandelayo, sizokwabelana ngendlela yokuhlola i-coating yezingxenye eziboshwe, ngakho-ke hlala ubukele.

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Isikhathi sokuthumela: Apr-10-2024