1 Incazelo kanye nezimbangela zomonakalo ongaphansi komhlaba
Ukulimala kwe-Sub-surface yezingxenye zokubona (i-SSD, umonakalo ongaphansi komhlaba) kuvame ukushiwo ezinhlelweni zokubona ezinembayo eziphezulu njengamasistimu e-laser aqinile nemishini ye-lithography, futhi ubukhona bakho bukhawulela ukunemba kokucubungula kokugcina kwezingxenye zamehlo futhi kuphinde kuthinte isithombe. ukusebenza kwezinhlelo ze-optical, ngakho-ke kudinga ukunakwa ngokwanele. Umonakalo ongaphansi komhlaba ngokuvamile ubonakala ngemifantu ngaphakathi kwendawo kanye nezendlalelo zengcindezi yangaphakathi, okubangelwa ukuhlukana okuthile okuyinsalela kanye nokuguqulwa kokwakheka kwezinto endaweni eseduze. Imodeli yomonakalo ongaphansi komhlaba iboniswa kanje: ungqimba olungaphezulu ungqimba lwenhlabathi epholishiwe, bese kuthi ungqimba lwe-crack defect kanye nongqimba lwe-stress deformation luwungqimba olungezansi, futhi ungqimba lwempahla ngaphandle kokulimala luwungqimba olungaphakathi impela. Phakathi kwazo, isendlalelo se-crack defect kanye nesendlalelo sokuguqulwa kwengcindezi kungumonakalo ongaphansi komhlaba.
Imodeli yomonakalo ongaphansi komhlaba wezinto ezibonakalayo
Izingxenye ezibonakalayo zezinto ezibonakalayo ngokuvamile ziyingilazi, i-ceramics nezinye izinto eziqinile neziphukayo, ekuqaleni kwesigaba sokucubungula izingxenye, kudingeka zidlule ekubumbeni kokugaya, ukugaya okuhle kanye nezinqubo zokupholisha amaholo, kulezi zinqubo, ukugaya ngomshini kanye nokusabela kwamakhemikhali kukhona. futhi udlale indima. Ithuluzi eliqhumayo noma eliqhumayo elithinta ubuso besici linezici zosayizi wezinhlayiyana ezingalingani, futhi amandla ephuzu ngalinye lokuxhumana elingaphezulu kwe-elementi alifani, ngakho-ke ungqimba lwe-convex ne-concave kanye nongqimba lwangaphakathi lokuqhekeka luzokwenza. kukhiqizwe phezu kwengilazi. Izinto ezikhona kungqimba oluqhekekile yingxenye ephukile ngesikhathi sokugaya, kodwa ayizange iwe phezulu, ngakho-ke umonakalo ongaphansi komhlaba uzokwakhiwa. Kungakhathaliseki ukuthi ukugaya okulimazayo kwezinhlayiya ezixekethile noma ukugaya kwe-CNC, lesi simo sizokwakhiwa ebusweni bento. Umthelela wangempela womonakalo ongaphansi komhlaba uboniswa emfanekisweni olandelayo:
Ukunikezwa komonakalo ongaphansi komhlaba
2 Izindlela zokulinganisa umonakalo ongaphansi komhlaba
Njengoba umonakalo ongaphansi komhlaba ungenakuzitshwa, kufanele ulawulwe ngokuphumelelayo abakhiqizi bezingxenye ze-optical. Ukuze uyilawule ngokuphumelelayo, kuyadingeka ukukhomba ngokunembile futhi ubone ubukhulu bomonakalo ongaphansi komhlaba ongaphezulu kwengxenye, kusukela ekuqaleni kwekhulu leminyaka elidlule, abantu baye bahlakulela izindlela ezihlukahlukene zokulinganisa nokuhlola ubukhulu. yomonakalo ongaphansi komhlaba wengxenye, ngokuya ngemodi yezinga lethonya engxenyeni ye-optical, ingahlukaniswa ngezigaba ezimbili: ukulinganisa okulimazayo kanye nesilinganiso esingonakali (ukuhlola okungabhubhisi).
Indlela yokulinganisa ebhubhisayo, njengoba negama libonisa, isidingo sokushintsha ukwakheka kwendawo ye-optical element, ukuze kubonakale umonakalo ongaphansi komhlaba ongelula ukuwubona, bese usebenzisa isibonakhulu nezinye izinsimbi ukuze ubuke. indlela yokulinganisa, le ndlela ngokuvamile idla isikhathi, kodwa imiphumela yayo yokulinganisa ithembekile futhi inembile. Izindlela zokulinganisa ezingabhubhi, ezingadali monakalo owengeziwe endaweni, zisebenzisa ukukhanya, umsindo, noma amanye amaza kagesi ukuze kutholwe isendlalelo somonakalo ongaphansi komhlaba, futhi zisebenzise inani lezinguquko ezenzekayo kungqimba ukuze zihlole usayizi wesakhiwo. i-SSD, izindlela ezinjalo zilula futhi ziyashesha, kodwa ngokuvamile ziwukubhekwa kwekhwalithi. Ngokwalokhu kuhlukaniswa, izindlela zamanje zokuthola umonakalo ongaphansi komhlaba ziboniswa esithombeni esingezansi:
Ukuhlukaniswa kanye nesifinyezo sezindlela zokuthola umonakalo ongaphansi komhlaba
Incazelo emfushane yalezi zindlela zokulinganisa ilandelayo:
A. Izindlela ezibhubhisayo
a) Indlela yokupholisha
Ngaphambi kokuvela kokupholishwa kwe-magnetorheological, izisebenzi zamehlo zazivame ukusebenzisa i-Taper polishing ukuze zihlaziye umonakalo ongaphansi komhlaba wezingxenye ze-optical, okungukuthi, ukusika indawo ekhanyayo nge-Angle etshekile ukuze zakhe indawo yangaphakathi etshekile, bese bepholisha indawo etshekile. Ngokuvamile kukholakala ukuthi ukupholishwa ngeke kubhebhethekise umonakalo wasekuqaleni ongaphansi komhlaba. Ukuqhekeka kwesendlalelo se-SSD kuzovezwa ngokusobala ngokugqwala kokucwiliswa ngama-reagents amakhemikhali. Ukujula, ubude kanye nolunye ulwazi lwesendlalelo somonakalo ongaphansi komhlaba kungalinganiswa ngokubhekwa kwe-optical surface ethambekele ngemva kokucwiliswa. Kamuva, ososayensi basungula indlela ye-Ball dimpling (Ball dimpling), okuwukusebenzisa ithuluzi lokupholisha eliyindilinga ukupholisha indawo ngemuva kokugaya, ukukhipha umgodi ngaphandle, ukujula komgodi kudinga ukujula ngangokunokwenzeka, ukuze ukuhlaziya ohlangothini lomgodi ungathola ulwazi lomonakalo ongaphansi komhlaba wendawo yokuqala.
Izindlela ezivamile zokuthola umonakalo ongaphansi komhlaba wezinto ezibonakalayo
I-Magnetorheological polishing (MRF) iyindlela esebenzisa umucu wamanzi kazibuthe ukupholisha izingxenye zamehlo, ezehlukile kokupholisha kwe-asphalt/i-polyurethane evamile. Ngendlela evamile yokupholishwa, ithuluzi lokupholisha ngokuvamile lisebenzisa amandla amakhulu avamile endaweni ekhanyayo, kuyilapho uMnumzane Ukupholisha esusa indawo ekhanyayo endaweni ehlangene, ngakho-ke uMnu. Ngakho-ke, uMnu Polishing angasetshenziselwa ukupholisha inkaba endaweni ekhanyayo. Khona-ke indawo yokupholisha iyahlaziywa ukuze kuhlolwe usayizi womonakalo ongaphansi komhlaba we-optical surface yasekuqaleni.
a) Vimba indlela yokunamathisela
Le ndlela iphinde yasetshenziswa ukuhlola umonakalo ongaphansi komhlaba. Eqinisweni, khetha isampula eliyisikwele elinomumo ofanayo kanye nokokusebenza, pholisha izindawo ezimbili zesampula, bese usebenzisa ingcina ukunamathisela izindawo ezimbili ezipholishiwe zesampula ndawonye, bese ugaya izinhlangothi zamasampuli amabili ndawonye ngesikhathi esifanayo. isikhathi. Ngemuva kokugaya, ama-reagents amakhemikhali asetshenziselwa ukuhlukanisa amasampula amabili ayizikwele. Ubukhulu bomonakalo ongaphansi komhlaba obangelwa yisiteji sokugaya bungahlolwa ngokubheka indawo epholishiwe ehlukanisiwe ngesibonakhulu. Umdwebo wohlelo lwenqubo umi kanje:
Umdwebo wohlelo lokutholwa komonakalo ongaphansi komhlaba ngendlela yokunamathela kwebhulokhi
Le ndlela inemikhawulo ethile. Ngenxa yokuthi kunendawo enamathelayo, isimo sendawo enamathelayo singase singabonisi ngokugcwele umonakalo wangempela ongaphansi komhlaba ngaphakathi kwempahla ngemva kokugaya, ngakho imiphumela yokulinganisa ingabonisa kuphela isimo se-SSD ngokwezinga elithile.
a) Ukufakwa kwamakhemikhali
Indlela isebenzisa ama-agent amakhemikhali afanelekile ukuze igugule ungqimba olulimele lwendawo yokubona. Ngemva kokuba inqubo yokuguguleka isiqediwe, umonakalo ongaphansi komhlaba uhlolwa ngokuma komphezulu kanye nokuqina kwengxenye engaphezulu kanye noshintsho lwenkomba lwezinga lokuguguleka. Ama-reagents amakhemikhali asetshenziswa kakhulu yi-hydrofluoric acid (HF), i-ammonium hydrogen fluoride (NH4HF) namanye ama-ejenti agqwalayo.
b) Indlela ye-cross section
Isampula liyahlukaniswa futhi isibonakhulu se-electron esithwebula sisetshenziselwa ukubuka ngokuqondile usayizi womonakalo ongaphansi komhlaba.
c) Indlela yokufaka udayi
Ngenxa yokuthi ungqimba olungaphezulu lwento ekhanyayo yomhlabathi luqukethe inani elikhulu lama-microcracks, odayi abangakha umehluko wombala ne-optical substrate noma ukuqhathanisa ne-substrate bangacindezelwa kokubalulekile. Uma i-substrate iqukethe izinto ezimnyama, odayi be-fluorescent bangasetshenziswa. Umonakalo ongaphansi komhlaba ungase uhlolwe kalula nge-optical noma ngogesi. Ngenxa yokuthi ukuqhekeka kuvame ukuhle kakhulu futhi ngaphakathi kwezinto ezibonakalayo, lapho ukujula kokungena kokungena kwedayi kunganele, kungase kungameleli ukujula kwangempela kwe-microcrack. Ukuze kutholwe ukujula kokuqhekeka ngokunembe ngangokunokwenzeka, kuye kwahlongozwa izindlela ezimbalwa zokumithisa odayi: ukucindezela kwangaphambili komshini kanye nokucindezela kwe-isostatic okubandayo, kanye nokusetshenziswa kwe-electron probe microanalysis (EPMA) ukuze kutholwe iminonjana kadayi ezindaweni eziphansi kakhulu.
B, izindlela ezingabhubhisi
a) Indlela yokulinganisa
Indlela yokulinganisa ngokuyinhloko ilinganisela ukujula komonakalo ongaphansi komhlaba ngokuya ngosayizi wezinhlayiyana zezinto eziqhumayo kanye nosayizi wobunzima obungaphezulu bengxenye. Abacwaningi basebenzisa inani elikhulu lokuhlola ukuze bathole ubudlelwano obuhambisanayo phakathi kosayizi wezinhlayiyana zezinto eziqhumayo kanye nokujula komonakalo ongaphansi komhlaba, kanye nethebula lokumatanisa phakathi kobukhulu bobulukhuni obungaphezulu bengxenye kanye ne-sub- umonakalo ebusweni. Umonakalo ongaphansi komhlaba wengxenye yamanje ungalinganiselwa ngokusebenzisa izincwadi zabo.
b) I-Optical Coherence Tomography (OCT)
I-Optical coherence tomography, isimiso esiyisisekelo esiwukugxambukela kwe-Michelson, ihlola ulwazi olulinganisiwe ngokusebenzisa amasignali okuphazamisa emisebe yokukhanya emibili. Le nqubo ivame ukusetshenziselwa ukubuka izicubu zebhayoloji futhi inikeze i-tomography ye-cross-sectional yesakhiwo esingaphansi kwethishu. Uma isu le-OCT lisetshenziselwa ukubona umonakalo ongaphansi komhlaba wendawo yokubona, ipharamitha yenkomba ye-refractive yesampula elinganisiwe kufanele icatshangelwe ukuze kutholwe ukujula kwangempela kokuqhekeka. Indlela kubikwa ukuthi ingathola ukukhubazeka ekujuleni kuka-500μm ngokulungiswa okuqondile okungcono kuno-20μm. Kodwa-ke, uma isetshenziselwa ukutholwa kwe-SSD kwezinto ezibonakalayo, ukukhanya okuvela kungqimba lwe-SSD abuthakathaka, ngakho-ke kunzima ukwakha ukuphazamiseka. Ngaphezu kwalokho, ukuhlakazeka kwendawo kuzophinde kuthinte imiphumela yokulinganisa, futhi ukunemba kokulinganisa kudinga ukuthuthukiswa.
c) Indlela yokuhlakaza i-laser
I-Laser irradiation endaweni ye-photometric, kusetshenziswa izici ezihlakazekayo ze-laser ukuhlola usayizi womonakalo ongaphansi komhlaba, nakho kuhlolisiswe kabanzi. Ezivamile zihlanganisa i-Total internal refection microscopy (TIRM), Confocal laser scanning microscopy (CLSM), kanye ne-intersecting polarization confocal microscopy (CPCM). i-cross-polarization confocal microscopy, njll.
d) Iskena isibonakhulu se-acoustic
I-Scanning acoustic microscopy (SAM), njengendlela yokuthola i-ultrasonic, iyindlela yokuhlola engonakalisi esetshenziswa kakhulu ukuthola amaphutha angaphakathi. Le ndlela ivame ukusetshenziselwa ukukala amasampula anezindawo ezibushelelezi. Uma ingaphezulu lesampula lukhuni kakhulu, ukunemba kokulinganisa kuzoncishiswa ngenxa yethonya lamagagasi ahlakazekile angaphezulu.
3 Izindlela zokulawula umonakalo ongaphansi komhlaba
Kuwumgomo wethu omkhulu ukulawula ngempumelelo umonakalo ongaphansi komhlaba wezingxenye ezibonayo futhi sithole izingxenye ezisusa ngokuphelele i-SSD. Ngaphansi kwezimo ezijwayelekile, ukujula komonakalo ongaphansi komhlaba kuyalingana nosayizi wosayizi wezinhlayiya eziqhumayo, usayizi wezinhlayiyana we-abrasive ube mncane, umonakalo ongaphansi komhlaba ungajulile, ngakho-ke, ngokunciphisa ubumbudumbudu bokugaya, futhi ngokugcwele. ukugaya, ungathuthukisa ngempumelelo izinga lomonakalo ongaphansi komhlaba. Umdwebo wokucubungula wokulawula umonakalo ongaphansi komhlaba ngezigaba uboniswa esithombeni esingezansi:
Umonakalo ongaphansi komhlaba ulawulwa ngezigaba
Isigaba sokuqala sokugaya sizosusa ngokugcwele umonakalo ongaphansi komhlaba endaweni engenalutho futhi sikhiqize i-subsurface entsha kulesi sigaba, bese esigabeni sesibili sokugaya, kuyadingeka ukususa i-SSD eyenziwe esigabeni sokuqala futhi ikhiqize umonakalo omusha ongaphansi komhlaba. futhi, ukucubungula ngokushintshana, futhi ulawule usayizi wezinhlayiyana nokuhlanzeka kwe-abrasive, futhi ekugcineni uthole indawo ekhanyayo elindelekile. Leli futhi isu lokucubungula elilandelwe ukukhiqizwa kwe-optical amakhulu eminyaka.
Ngaphezu kwalokho, ngemva kwenqubo yokugaya, ukuqoqa ubuso bengxenye kungasusa ngokuphumelelayo umonakalo ongaphansi komhlaba, ngaleyo ndlela kuthuthukiswe izinga eliphezulu futhi kuthuthukise ukusebenza kahle kokucubungula.
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Isikhathi sokuthumela: Apr-18-2024
